Topical Conference: A Key to Competitiveness: The Science and Technology of Manufacturing; Orlando, Florida; November 15-19, 1993

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9319088 Rubloff This topical conference is devoted to the science and technology which underlie manufacturing processes and associated vacuum based process and diagnostic equipment, particularly as applied to microelectronics. Speakers at the conference will elucidate concepts central to manufacturing effectiveness, describe the nature of technology development and the manufacturing environment, and emphasize early assessment of manufacturability. They will also indicate how fundamental and applied research from the AVS community can significantly benefit manufacturing by focussing on key manufacturing issues, providing relevant insights, and developing process, equipment, and diagnostic approaches for well controlled manufacturing processes.