Topical Conference: A Key to Competitiveness: The Science and Technology of Manufacturing; Orlando, Florida; November 15-19, 1993

这个专题会议致力于科学和技术的基础上的制造过程和相关的真空为基础的过程和诊断设备，特别是应用于微电子。会议的演讲者将阐明制造效率的核心概念，描述技术发展的本质和制造环境，并强调可制造性的早期评估。他们还将说明AVS社区的基础和应用研究如何通过关注关键制造问题，提供相关见解，以及为良好控制的制造过程开发工艺，设备和诊断方法，从而显着造福制造业。

9319088 Rubloff This topical conference is devoted to the science and technology which underlie manufacturing processes and associated vacuum based process and diagnostic equipment, particularly as applied to microelectronics. Speakers at the conference will elucidate concepts central to manufacturing effectiveness, describe the nature of technology development and the manufacturing environment, and emphasize early assessment of manufacturability. They will also indicate how fundamental and applied research from the AVS community can significantly benefit manufacturing by focussing on key manufacturing issues, providing relevant insights, and developing process, equipment, and diagnostic approaches for well controlled manufacturing processes.