Student Support for 2000 Int'l Conference on Characterization and Metrology for Technology to be held at NIST, Gaithersburg, MD.

学生支持 2000 年国际技术表征和计量会议在马里兰州盖瑟斯堡 NIST 举行。

• 批准号: 0087000
• 负责人: Gary Rubloff
• 金额: $ 0.5万
• 依托单位: University of Maryland, College Park
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-07-01 至 2001-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0087000&HistoricalAwards=false
• 关键词: Student; Support; 2000; Int; Conference

NSF support of $5000 is requested for student participation at the 2000 International Conference Characterization and Metrology for ULSI Technology. This Conference will be held at NIST, Gaithersburg, MD, June 26-29, 2000. It continues a sequence of two highly successful conferences held in 1995 and 1998, each of which led to a formidable Proceedings book published by the AIP Press. The funds will support student travel and registration for about 20 students who will be making presentations and submitting papers for the Conference Proceeings. The Semiconductor Research Corporation (SRC) and the American Vacuum Society (AVS) are also contributing funds toward student support ($5K from SRC, $2K from AVS).

要求国家科学基金会为学生参加2000年国际超大规模集成电路技术表征和计量会议提供5000美元的资助。这次会议将于2000年6月26日至29日在马里兰州盖瑟斯堡的NIST举行。它延续了1995年和1998年举行的两次非常成功的会议，每一次会议都导致了由AIP出版社出版的一本令人敬畏的论文集。这笔资金将支持大约20名学生的旅费和注册，他们将在会议上发表演讲并提交论文。半导体研究公司(SRC)和美国真空学会(AVS)也在为学生资助提供资金(SRC提供5000美元，AVS提供2000美元)。