Simulation-Based Learning Systems for Environmentally-Benign Semiconductor Manufacturing

用于环保半导体制造的基于仿真的学习系统

• 批准号: 9978123
• 负责人: Gary Rubloff
• 金额: $ 40万
• 依托单位: University of Maryland, College Park
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-09-15 至 2003-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9978123&HistoricalAwards=false
• 关键词: Simulation; Based; Learning; Systems; Environmentally

AbstractEEC-9978123Gary Rubloff, PIThis award provides funding from the Engineering Research Centers (ERC) Program to the self-sustaining NSF ERC called the Institute for Systems Research (ISR) at the University of Maryland, College Park, and the NSF/SRC ERC for Environmentally- Benign Semiconductor Manufacturing (CEBSM) at the University of Arizona, Tucson, to jointly develop a portfolio of interactive, computer-based simulator learning modules to support education in the design for environment (DFE). These modules will be developed by application domain experts at CEBSM and software and cognitive science developers of simulator-based learning systems at ISR. The modules will incorporate existing simulator codes developed by CEBSM as a part of their research program in areas such as water purification, water usage in wafer rinsing, and the water recycle process. Students will be able simulate an entire system as well as explore the design of subsystems. The modules will incorporate components that are appropriate for learning at the high school, undergraduate and graduate levels and by practicing engineers and scientists. The modules will be evaluated at various educational levels, including testing by industry experts, and disseminated among the CEBSM institutions.

该奖项从工程研究中心（ERC）计划中为马里兰州大学的系统研究所（ISR）和亚利桑那大学图森分校的NSF/SRC环境友好半导体制造（CEBSM）提供资金，以共同开发一个交互式，基于计算机的模拟器学习模块，以支持环境设计（DFE）的教育。 这些模块将由CEBSM的应用领域专家和ISR基于模拟器的学习系统的软件和认知科学开发人员开发。 这些模块将整合CEBSM开发的现有模拟器代码，作为其研究计划的一部分，如水净化，晶圆清洗用水和水循环过程。 学生将能够模拟整个系统以及探索子系统的设计。 这些模块将包括适合高中、本科和研究生学习的内容，以及实习工程师和科学家的内容。 这些模块将在各级教育中进行评估，包括由行业专家进行测试，并在CEBSM机构中传播。