Simulation-Based Learning Systems for Environmentally-Benign Semiconductor Manufacturing

摘要EEC-9978123 Gary Rubloff，PIT他的奖项从工程研究中心(ERC)计划提供资金给自给自足的NSF ERC，称为马里兰大学系统研究所(ISR)，以及NSF/SRC ERC，用于环境友好型半导体制造(CEBSM)，共同开发一系列交互式、基于计算机的模拟器学习模块，以支持环境设计(DFE)教育。这些模块将由CEBSM的应用领域专家和ISR基于模拟器的学习系统的软件和认知科学开发人员开发。这些模块将纳入CEBSM开发的现有模拟器代码，作为其在水净化、晶片漂洗用水量和水循环过程等领域研究计划的一部分。学生将能够模拟整个系统，并探索子系统的设计。这些模块将包含适合高中、本科生和研究生水平以及实习工程师和科学家学习的组件。这些单元将在不同的教育级别进行评估，包括由行业专家进行测试，并在CEBSM机构中传播。

AbstractEEC-9978123Gary Rubloff, PIThis award provides funding from the Engineering Research Centers (ERC) Program to the self-sustaining NSF ERC called the Institute for Systems Research (ISR) at the University of Maryland, College Park, and the NSF/SRC ERC for Environmentally- Benign Semiconductor Manufacturing (CEBSM) at the University of Arizona, Tucson, to jointly develop a portfolio of interactive, computer-based simulator learning modules to support education in the design for environment (DFE). These modules will be developed by application domain experts at CEBSM and software and cognitive science developers of simulator-based learning systems at ISR. The modules will incorporate existing simulator codes developed by CEBSM as a part of their research program in areas such as water purification, water usage in wafer rinsing, and the water recycle process. Students will be able simulate an entire system as well as explore the design of subsystems. The modules will incorporate components that are appropriate for learning at the high school, undergraduate and graduate levels and by practicing engineers and scientists. The modules will be evaluated at various educational levels, including testing by industry experts, and disseminated among the CEBSM institutions.