ERC for Simulator-Based Manufacturing Education and Trainingfor Microelectronics Processing

该项目的目标是开发、演示、评估和完善一种新的制造教育和培训方法，该方法有望在广泛的技术专长范围内提高制造业劳动力的效率。这项工作的核心是基于计算机的动态模拟和可视化的化学过程的时间依赖行为，以及用于执行微电子制造这些过程的相关设备。模拟将从半导体制造领域的设计、优化和控制开始，然后验证代表半导体制造设备和工艺的物理和化学行为的元素。该计划包括模拟器开发和集成、制造培训模块、工程设计模块以及评估和传播。长期目标是提供一系列模拟，可用于培训工业技术人员，研究生工程师和研究生在电子制造中使用的设备的操作，并允许研究和开发新的和/或改进的制造设备。

The goal of this project is to develop, demonstrate, assess, and refine a new approach to manufacturing education and training which promises to enhance the effectiveness of the manufacturing workforce across a broad range of technical expertise. The heart of the effort is a computer-based dynamic simulation and visualization of the time-dependent behavior of chemical processes and associated equipment used to execute these processes in microelectronics manufacturing. The simulations will begin with design, optimization, and control in the area of semiconductor manufacturing, and will then validate the elements that represent the physical and chemical behavior of semiconductor manufacturing equipment and processes. The program includes simulator development and integration, manufacturing training modules, engineering design modules, and assessment and dissemination. The long term goals are to provide a range of simulations that can be used for training industrial technicians, graduate engineers, and graduate students in the operation of the equipment being used in electronics ma nufacturing, and to allow research and development of new and/or improved manufacturing equipment.