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ERC for Simulator-Based Manufacturing Education and Trainingfor Microelectronics Processing

ERC for Simulator-Based Manufacturing Education and Trainingfor Microelectronics Processing
ERC 用于基于模拟器的微电子加工制造教育和培训
批准号:
9696212
负责人:
Gary Rubloff
金额:
$52.87万
依托单位国家:
美国
项目类别:
Standard Grant
财政年份:
1996
资助国家:
美国
项目状态:
已结题
起止时间:
1996-08-15 至 2000-08-31

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会议论文
Collaborative Research: Promoting or Suppressing Solid-State Phase Transformation via Interface Control
Student Support for 2000 Int'l Conference on Characterization and Metrology for Technology to be held at NIST, Gaithersburg, MD.
Simulation-Based Learning Systems for Environmentally-Benign Semiconductor Manufacturing
ERC for Simulator-Based Manufacturing Education and Trainingfor Microelectronics Processing
  • 批准号:
    9526147
  • 项目类别:
    Standard Grant
  • 资助金额:
    $60.01万
  • 财政年份:
    1995
  • 负责人:
    Gary Rubloff
  • 依托单位:
海外基金