Effect of Substrate Surface Microstructure on the Metalorganic Molecular Beam Epitaxy (MOMBE) Growth of Zinc Selenide on the (100) Face of Gallium Arsenide

小行星9321341 本项目的目标是提供一个全面的描述，在砷化镓（100）表面上的硒化锌（ZnSe）外延层的生长所涉及的表面化学现象，并开发表面化学，薄膜结构和界面性能之间的关系。 研究了GaAs（100）衬底表面重构对金属有机分子束外延（MOMBE）生长ZnSe薄膜的影响。 利用程序升温脱附和高分辨电子能量损失谱（HREELS）研究了二甲基锌、二乙基锌和二乙基硒在富砷的c（4x 4）和c（2x 8）重构以及近化学计量比（1x 6）重构GaAs（100）上的吸附和反应。 这些结果进行了比较，从以前的研究中丰富的镓（4x 1）重建。 用原子力显微镜和扫描隧道显微镜研究了ZnSe薄膜的形貌和表面结构随GaAs（100）衬底重构和工艺条件（温度、压力等）的变化。 利用高分辨电子能量损失谱（HREELS）和非线性光学谱研究了ZnSe/GaAs界面的结构和电子性质。 本项目研究的特定耦合用于二极管、LED、激光器和其他光电器件。 加工技术的改进应能扩大用途。 此外，这种努力的大部分可以推广到其他II-VI / III-V异质结。

9321341 Vohs The objectives of this project are to provide a comprehensive description of the surface-chemical phenomena involved in the growth of epitaxial layers of zinc selenide (ZnSe) on the (100) surface of gallium arsenide (GaAs) and to develop relationships between surface chemistry, film structure, and interfacial properties. The influence of surface reconstruction of a GaAs(100) substrate on the growth of epitaxial ZnSe films using metalorganic molecular-beam epitaxy (MOMBE) is studied. The adsorption and reaction of dimethylzinc, diethylzinc, and diethylselenium on the arsenic-rich c(4x4) and c(2x8) reconstructions and the nearly stoichiometric (1x6) reconstruction of GaAs(100) are investigated using temperature-programmed desorption and high-resolution electron-energy-loss spectroscopy (HREELS). These results are compared with those from previous studies on the gallium-rich (4x1) reconstruction. The morphology and surface structure of ZnSe films are characterized using atomic force microscopy and scanning tunnelling microscopy as functions of GaAs(100) substrate reconstruction and processing conditions (temperature, pressure, etc.). Structure and electronic properties of ZnSe/GaAs interfaces are probed using HREELS and nonlinear optical spectroscopies. The specific couple studied in this project is used in diodes, LEDs, lasers, and other optoelectronic devices. Improved processing techniques should lead to expanded uses. Additionally, much of this effort may be generalizable to other II-VI / III-V heterojunctions.