Instrumentation for Hybrid-Integrated Components for the Information Highway

该奖项是为了获得半导体处理和测试设备，以制造高效电子/光子接口所需的组件。佐治亚理工学院开发了一种“混合集成”技术，可以将射频和光电子功能集成到芯片上，成本与标准芯片相当。该设备包括用于光电材料的分子束外延单元、用于沉积介电膜的等离子体增强化学气相沉积单元、离子蚀刻器、倒装芯片对准器、非常高速测试仪和极化分析仪以及用于计算工作的工作站集群。该设备支持通信和网络接口组件的设计、制造和测试，包括串行光电和无线混合集成接口、并行网络接口和波分复用接口。＊＊＊

9413848 Higgins This award is for the acquisition of semiconductor processing and testing equipment to make components necessary for efficient electronic/photonic interfaces. Georgia Institute of Technology has developed "hybrid integration" techniques that allow rf and optoelectronic functions to be incorporated on chips with costs comparable to standard chips. The equipment includes a molecular beam epitaxy unit for optoelectronic materials, a plasma-enhanced chemical vapor deposition unit for deposition of dielectric films, an ion etcher, a flip-chip aligner, a very high speed tester and polarization analyzer, and a workstation cluster for computational work. The equipment supports the design, fabrication, and testing of communications and network interface components including serial optoelectronic and wireless hybrid integrated interfaces, parallel network interfaces, and wave-division multiplex interfaces. ***