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Undergraduate Microelectronics Processing Lab: An Ideal Setting for Synthesis and Processing

Undergraduate Microelectronics Processing Lab: An Ideal Setting for Synthesis and Processing
本科生微电子处理实验室:合成和处理的理想环境
批准号:
9450876
负责人:
Linda Vanasupa
金额:
$6.78万
依托单位国家:
美国
项目类别:
Standard Grant
财政年份:
1994
资助国家:
美国
项目状态:
已结题
起止时间:
1994-07-01 至 1997-12-31

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中文摘要
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英文摘要
9450876 Vanasupa This project focusses on enhancing materials engineering education at Cal Poly in the area of advanced materials synthesis and processing. With the funds provided by this grant, we will purchase a sputtering system and an ellipsometer to complete the instrumentation required for a microelectronics processing lab. Microelectronics processing is an ideal setting for learning the relationship between materials processing and the resulting properties: the materials used, like silicon, have properties that are highly sensitive to processing conditions, clearly demonstrating the link between the processing conditions and the material properties. Microelectronics processing also exposes the materials engineering student to a spectrum of engineering materials, involving polymers, ceramics and metals.
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