Interferometer Instrumentation for Characterization of Micro-mechanical Structures

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9504099 Kenny, Thomas This project is concerned with the design, fabrication, and characterization of micromechanical structures and devices. Emphasis is on the characterization of the fabricated micromechanical structures. Accurate non-contact measurements of mechanical properties are also very important. This instrumentation will be used in support of several experiments, including characterization of tunneling sensors, study of mode shapes in micromachined sensor components, and fundamental characterization of mechanical microstructures, with emphasis on evolution of characteristics with environmental parameters, such as pressure or temperature. This interferometer-based measurement system is on its way to becoming a standard for micromechanical structure characterization in industry, and represents a unique resource in the academic community. It will provide a fundamentally new capability for microstructure characterization, and enable graduate students to carry out measurements using equipment which they can expect to encounter in industry after graduation. This instrumentation represents an invaluable enhancement in the device testing capabilities at Stanford as uell as an opportunity to carry out ground-breaking research into the fundamental properties of micromechanical structures.