Interferometer Instrumentation for Characterization of Micro-mechanical Structures

用于表征微机械结构的干涉仪仪器

• 批准号: 9504099
• 负责人: Thomas Kenny
• 金额: $ 10.6万
• 依托单位: Stanford University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-06-15 至 1996-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9504099&HistoricalAwards=false
• 关键词: Interferometer; Instrumentation; Characterization; Micro; mechanical

9504099 Kenny, Thomas This project is concerned with the design, fabrication, and characterization of micromechanical structures and devices. Emphasis is on the characterization of the fabricated micromechanical structures. Accurate non-contact measurements of mechanical properties are also very important. This instrumentation will be used in support of several experiments, including characterization of tunneling sensors, study of mode shapes in micromachined sensor components, and fundamental characterization of mechanical microstructures, with emphasis on evolution of characteristics with environmental parameters, such as pressure or temperature. This interferometer-based measurement system is on its way to becoming a standard for micromechanical structure characterization in industry, and represents a unique resource in the academic community. It will provide a fundamentally new capability for microstructure characterization, and enable graduate students to carry out measurements using equipment which they can expect to encounter in industry after graduation. This instrumentation represents an invaluable enhancement in the device testing capabilities at Stanford as uell as an opportunity to carry out ground-breaking research into the fundamental properties of micromechanical structures.

9504099 Kenny，Thomas这个项目涉及微机械结构和设备的设计、制造和表征。重点是对所制造的微机械结构的表征。机械性能的准确非接触测量也是非常重要的。该仪器将用于支持几个实验，包括隧道传感器的特性、微机械传感器组件中的模式形状的研究以及机械微结构的基本特性，重点是特性随环境参数(如压力或温度)的演变。这种基于干涉仪的测量系统正在成为工业中微机械结构表征的标准，在学术界代表着独特的资源。它将为微观结构表征提供一种全新的能力，并使研究生能够使用他们毕业后在工业中可能遇到的设备进行测量。这一仪器代表着斯坦福大学设备测试能力的无价增强，同时也是对微机械结构基本特性进行开创性研究的机会。