Chemical Sensors for CVD Processing

用于 CVD 处理的化学传感器

• 批准号: 9510099
• 负责人: Arthur Ellis
• 金额: $ 44万
• 依托单位: University of Wisconsin-Madison
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-06-15 至 1999-11-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9510099&HistoricalAwards=false
• 关键词: Chemical; Sensors; CVD; Processing

ABSTRACT CTS-9510099 This effort is directed to the understanding and design of novel photoluminescent chemical sensors based upon adsorption onto a compound semiconductor surface. Previous work has established the feasibility of this approach. Changes in the near-surface region of the semiconductor due to reversible chemisorption form the basis of the sensor; modulation of the depletion width of the surface region of the semiconductor leads to changes in the photoluminescence intensity observed from these structures. The thrust of this project is concerned with sensing materials and materials structures with high sensitivity and high detectivity. The use of modern epitaxial techniques such as metalorganic vapor-phase epitaxy (MOVPE) allows production of engineered materials structures tailored to enhance the response of the semiconductor to the specific adsorbed species. New chemical approaches to sensing a wide variety of technologically important substrates, including silanes and group III and group V CVD precursors, are explored. New sensing devices in which electron transport as well as photoluminescence is used as the sensor signal are developed and modeled. Causes of long-term degradation of the sensor structures and means to inhibit such changes are also explored. New approaches to sensor design and implementation are badly needed; in some cases, such as semiconductor processing, sensors may be the limiting factor in improving quality and advancing design implementation. This effort applies semiconductor device technology to the production of small, inexpensive, robust sensors without mechanical components. The specific systems under study are applicable to the production of compound semiconductors and solid-state devices. The basic approach has a much broader applicability. ***

摘要 CTS-9510099 这项工作旨在理解和设计基于化合物半导体表面吸附的新型光致发光化学传感器。 先前的工作已经证实了这种方法的可行性。 由于可逆化学吸附引起的半导体近表面区域的变化构成了传感器的基础； 半导体表面区域的耗尽宽度的调制导致从这些结构观察到的光致发光强度的变化。 该项目的重点是具有高灵敏度和高探测率的传感材料和材料结构。 使用金属有机气相外延 (MOVPE) 等现代外延技术可以生产定制的工程材料结构，以增强半导体对特定吸附物质的响应。 探索了传感各种技术上重要的基材（包括硅烷以及 III 族和 V 族 CVD 前体）的新化学方法。 开发并建模了使用电子传输和光致发光作为传感器信号的新型传感装置。 还探讨了传感器结构长期退化的原因以及抑制这种变化的方法。 迫切需要新的传感器设计和实现方法；在某些情况下，例如半导体加工，传感器可能是提高质量和推进设计实施的限制因素。 这项工作将半导体器件技术应用于生产小型、廉价、坚固的传感器，无需机械部件。 正在研究的特定系统适用于化合物半导体和固态器件的生产。 基本方法具有更广泛的适用性。 ***