Acquisition of Equipment to Upgrade a Microfabrication Facility for Research and Teaching

点击翻译按钮获取中文摘要

9512230 Huber This proposal requests equipment to upgrade the existing Microfabrication laboratory facility at the university of Utah, which is operated by the College of Engineering and used by 5 departments. The laboratory was created in 1977-8 by a grant from the HEDCO Foundation and UU institutional funds with further help from the DoE in the late 80's to improve the facilities and, more recently, from the Whitaker Foundation in the area of MEMs technology. A variety of fabrication equipment is requested, such as a back-side' mask aligner, flip-chip' aligner/bonder, furnaces, sputtering system, RTA system, SPM, and general repair/modifications to existing process equipment. The focus of the research is with sensors for medical applications which involves MEMS technology. ***