Acquisition of Equipment to Upgrade a Microfabrication Facility for Research and Teaching

9512230 Huber该提案要求设备升级犹他大学现有的微加工实验室设施，该实验室由工程学院运营，由5个系使用。该实验室成立于1977- 1978年，由HEDCO基金会和UU机构基金资助，并在80年代后期得到美国能源部的进一步帮助，以改善设施，最近又得到惠特克基金会在MEMs技术领域的帮助。需要各种制造设备，如背面“掩模校准器”、倒装芯片校准器/粘合器、熔炉、溅射系统、RTA系统、SPM以及对现有工艺设备的一般维修/修改。研究的重点是涉及MEMS技术的医疗应用传感器。＊＊＊

9512230 Huber This proposal requests equipment to upgrade the existing Microfabrication laboratory facility at the university of Utah, which is operated by the College of Engineering and used by 5 departments. The laboratory was created in 1977-8 by a grant from the HEDCO Foundation and UU institutional funds with further help from the DoE in the late 80's to improve the facilities and, more recently, from the Whitaker Foundation in the area of MEMs technology. A variety of fabrication equipment is requested, such as a back-side' mask aligner, flip-chip' aligner/bonder, furnaces, sputtering system, RTA system, SPM, and general repair/modifications to existing process equipment. The focus of the research is with sensors for medical applications which involves MEMS technology. ***