Acquisition of Equipment to Upgrade a Microfabrication Facility for Research and Teaching

购置设备以升级用于研究和教学的微加工设施

• 批准号: 9512230
• 负责人: Richard Normann
• 金额: $ 88.54万
• 依托单位: University of Utah
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-09-15 至 1999-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9512230&HistoricalAwards=false
• 关键词: Acquisition; Equipment; Upgrade; Microfabrication; Facility

9512230 Huber This proposal requests equipment to upgrade the existing Microfabrication laboratory facility at the university of Utah, which is operated by the College of Engineering and used by 5 departments. The laboratory was created in 1977-8 by a grant from the HEDCO Foundation and UU institutional funds with further help from the DoE in the late 80's to improve the facilities and, more recently, from the Whitaker Foundation in the area of MEMs technology. A variety of fabrication equipment is requested, such as a back-side' mask aligner, flip-chip' aligner/bonder, furnaces, sputtering system, RTA system, SPM, and general repair/modifications to existing process equipment. The focus of the research is with sensors for medical applications which involves MEMS technology. ***

小行星9512230 本提案要求提供设备，以升级犹他州大学现有的微加工实验室设施，该设施由工程学院运营，由5个系使用。 该实验室成立于1977-8年，由HEDCO基金会和UU机构基金资助，并在80年代后期得到能源部的进一步帮助，以改善设施，最近又得到惠特克基金会在MEMS技术领域的帮助。 需要各种制造设备，例如背面“掩模对准器”、倒装芯片对准器/焊接机、熔炉、溅射系统、RTA系统、SPM以及对现有工艺设备的一般维修/修改。 研究的重点是涉及MEMS技术的医疗应用传感器。 ***