Helicon Wave Studies

螺旋波研究

• 批准号: 9529565
• 负责人: Noah Hershkowitz
• 金额: $ 20.44万
• 依托单位: University of Wisconsin-Madison
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1996
• 资助国家: 美国
• 起止时间: 1996-09-01 至 2000-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9529565&HistoricalAwards=false
• 关键词: Helicon; Wave; Studies

Proposal Number: ECS-9529565 Principal Investigator: Noah Hershkowitz/University of Wisconsin Title: Helicon Wave Studies In this research, a high density helicon plasma source will be developed. The helicon plasma source is anticipated as the highest density plasma source for semiconductor plasma processing applications. In these experiments the high density helicon source will be generated through use of increased rf-power and multiple antennas to couple efficiently to all regimes of the helicon dispersion relation: one antenna for low power operation in the collisionless regime to initiate the plasma and a second antenna operating at higher power to increase helicon plasma density in the collisional regime. A short pulse (10 ms) of 50 kW of rf will be injected via the second antenna into a low power steady state to obtain densities of 1014 cm-3. In addition to providing a high density large volume plasma source, these experiments will test the parameter scalings and physical models in regimes not fully explored. The non-appearance of the m=-1 mode, an open fundamental question, will be especially explored using an antenna configuration designed to force its generation. A very important part of the proposed research is the development of new diagnostics needed for such high density plasmas. Diagnostics for these experiments will include a ruby laser Thompson scattering system for electron temperature measurements, to replace the Langmuir probes which would not operate under the experimental conditions; and a microwave interferometry system available from he Phaedrus-B Tandem mirror to allow measurement of wave dispersion. Segmented endloss detectors, retarding field energy analyzers, and Pt grid bolometric radiation detectors will provide data to determine power scaling and power balance of the high density pulsed plasma.

提案编号：ECS-9529565 主要研究者：Noah Hershkowitz/威斯康星州大学 标题：螺旋波研究 在本研究中，我们将发展一个高密度螺旋电浆源。螺旋等离子体源被预期为用于半导体等离子体处理应用的最高密度等离子体源。在这些实验中，高密度螺旋源将通过使用增加的射频功率和多个天线来产生，以有效地耦合到螺旋色散关系的所有机制：一个天线用于在无碰撞机制中低功率操作以启动等离子体，第二个天线在较高功率下操作以增加碰撞机制中的螺旋等离子体密度。 将通过第二个天线将50 kW射频的短脉冲（10 ms）注入低功率稳态，以获得1014 cm-3的密度。 除了提供高密度大体积等离子体源之外，这些实验还将在尚未充分探索的情况下测试参数缩放和物理模型。 不出现的m=-1模式，一个开放的基本问题，将特别探讨使用天线配置设计，以迫使其产生。 拟议研究的一个非常重要的部分是开发这种高密度等离子体所需的新诊断方法。这些实验的诊断将包括一个红宝石激光汤普森散射系统的电子温度测量，以取代朗缪尔探针，将无法在实验条件下工作;和微波干涉测量系统可从他的Phaedrus-B串联镜，以允许测量波的色散。 分段endloss探测器，减速场能量分析仪，铂栅测辐射热探测器将提供数据，以确定高密度脉冲等离子体的功率缩放和功率平衡。