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Collaborative Research: Efficient Fabrication of Microelectromagnetic Devices by Micromolding

Collaborative Research: Efficient Fabrication of Microelectromagnetic Devices by Micromolding
合作研究:通过微成型有效制造微电磁器件
批准号:
0355544
负责人:
Noah Hershkowitz
金额:
$9.41万
依托单位国家:
美国
项目类别:
Standard Grant
财政年份:
2004
资助国家:
美国
项目状态:
已结题
起止时间:
2004-05-15 至 2007-04-30

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英文摘要
This collaborative project from Louisiana State University (LSU) and University of Wisconsin (UW) proposes a hybrid approach to further advance the technology of high temperature metal micromolding. By combining elements of LiGA, microscale electrical discharge machining, high density plasma etching and smoothing, and high temperature nanostructured ceramic coatings, we aim to achieve high temperature micromolding of Ni-Fe alloys and build Ni-Fe based electromagnetic microactuators.Intellectual merit: Pushing the technology of metal micromolding to much higher temperatures (~800 oC) entails undertaking significant research in a number of areas:1) Developing new means of efficient fabrication of complex, high-aspect-ratio, microscale patterns out of high temperature materials2) Understanding critical factors controlling high temperature structural and chemical stability of nanostructured ceramic coatings3) Understanding high temperature tribochemistry of sliding contacts between ceramic nanocomposites and Ni-Fe alloys4) Understanding mechanics of the high temperature micromolding process5) Improving design of microelectromagnetic devices for manufacturing by micromoldingCompletion and integration of these research elements lay the scientific foundation of high temperature micromanufacturing of metal-based HARMs devices.Broader impact: The ability to inexpensively replicate metal and alloy based HARMs by molding offers the potential for commercialization of numerous microelectromagnetic, micromechanical, and microchemical devices. Through joint LSU-WU workshops, interactions between students from both institutions will be promoted. The planned research exposes graduate students to diverse disciplines. Through ongoing interactions between LSU and Southern University (SU), we will interest minority students in micromanufacturing research, and recruit them into graduate programs at LSU and SU.
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  • 批准号:
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  • 项目类别:
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  • 资助金额:
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  • 批准号:
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  • 项目类别:
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