Collaborative Research: Efficient Fabrication of Microelectromagnetic Devices by Micromolding

路易斯安那州立大学（LSU）和威斯康星大学（UW）的合作项目提出了一种混合方法，以进一步推进高温金属微成型技术。通过结合LiGA、微尺度电火花加工、高密度等离子体刻蚀与光滑、高温纳米陶瓷涂层等技术，实现Ni-Fe合金的高温微成型，构建Ni-Fe基电磁微致动器。学术价值:将金属微成型技术推向更高的温度（~800℃）需要在许多领域进行重要的研究：1)开发新的高效制造复杂，高纵横比，2)了解控制纳米结构陶瓷涂层高温结构和化学稳定性的关键因素3)了解陶瓷纳米复合材料与Ni-Fe合金之间滑动接触的高温摩擦化学4)了解高温微成型过程的机理5)改进微成型制造微电磁器件的设计完成并整合这些研究元素为金属基HARMs器件的高温微制造奠定了科学基础。更广泛的影响：通过模塑廉价复制金属和合金基harm的能力为许多微电磁、微机械和微化学设备的商业化提供了潜力。通过LSU-WU联合研讨会，两校学生之间的互动将得到促进。计划中的研究使研究生接触到不同的学科。通过路易斯安那州立大学和南方大学之间的持续互动，我们将吸引少数民族学生对微制造研究感兴趣，并将他们招募到路易斯安那州立大学和南方大学的研究生项目中。

This collaborative project from Louisiana State University (LSU) and University of Wisconsin (UW) proposes a hybrid approach to further advance the technology of high temperature metal micromolding. By combining elements of LiGA, microscale electrical discharge machining, high density plasma etching and smoothing, and high temperature nanostructured ceramic coatings, we aim to achieve high temperature micromolding of Ni-Fe alloys and build Ni-Fe based electromagnetic microactuators.Intellectual merit: Pushing the technology of metal micromolding to much higher temperatures (~800 oC) entails undertaking significant research in a number of areas:1) Developing new means of efficient fabrication of complex, high-aspect-ratio, microscale patterns out of high temperature materials2) Understanding critical factors controlling high temperature structural and chemical stability of nanostructured ceramic coatings3) Understanding high temperature tribochemistry of sliding contacts between ceramic nanocomposites and Ni-Fe alloys4) Understanding mechanics of the high temperature micromolding process5) Improving design of microelectromagnetic devices for manufacturing by micromoldingCompletion and integration of these research elements lay the scientific foundation of high temperature micromanufacturing of metal-based HARMs devices.Broader impact: The ability to inexpensively replicate metal and alloy based HARMs by molding offers the potential for commercialization of numerous microelectromagnetic, micromechanical, and microchemical devices. Through joint LSU-WU workshops, interactions between students from both institutions will be promoted. The planned research exposes graduate students to diverse disciplines. Through ongoing interactions between LSU and Southern University (SU), we will interest minority students in micromanufacturing research, and recruit them into graduate programs at LSU and SU.