SBIR Phase II: Conformal Ion Implantations Development for Surface Modification

DMI-9531388阿德勒离子注入可以在不改变底层衬底的情况下改变表面的性质。该技术在金属表面减磨减蚀方面得到了越来越多的应用。由于植入通常是一个“视线”过程，这些应用中的许多都受到了限制。等离子体源离子注入(PSII)有可能克服这一限制，只要能使等离子体在整个植入过程中与表面“一致”。等离子体密度和电力系统驱动条件的限制通常会限制植入物与表面的一致性程度。通过增加等离子体密度和电源系统峰值功率，可以克服这些限制，导致植入物的均匀性显著改善，并随后增加植入物作为表面改性技术的实用性。在第一阶段，我们通过实验证明，我们可以生产出一种系统，在该系统中，等离子体与被植入物体的距离在1-2厘米以内。这是通过改进等离子体源和为植入提供动力的脉冲功率系统来实现的。在我们提议的第二阶段计划中，我们将升级NSRC现有的脉冲功率设备，并建造一个新的高密度等离子体源，以便在高功率下进行这种类型的保形植入。这项拟议的技术将使人们有可能将植入技术应用于模具和模具等凹凸不平的表面。这将增加该技术的应用范围，并提高模具寿命。

DMI-9531388 Adler Ion implantation can change the properties of a surface without changing the underlying substrate. This technology has growing applications in wear reduction and corrosion reduction of metal surfaces. Many of these applications have been limited by the fact that implantation is usually a "line of sight process. Plasma source ion implantation (PSII) has the potential to overcome this limitation as long as the plasma can be made to "conform" to the surface throughout the implant's duration. Limitations in plasma density and power system drive conditions often limit the degree to which the implant conforms to the surface. By increasing the plasma density and power system peak power, those limitations can be overcome, leading to a significant improvement in the uniformity of the implant and a subsequent increase in implant utility as a surface modification technique. In phase I we demonstrated through experiments that we could produce a system in which the plasma conformed to the object being implanted to within 1-2 cm. This was accomplished through improvements in the plasma source, and in the pulsed power system which powers the implantation. In our proposed phase II program, we will upgrade existing pulsed power equipment at NSRC and build a new high density plasma source in order to perform conformal implants of this type at high power. The proposed technology will make it possible to apply implantation to surfaces which are "bumpy" such as dies and molds. This will increase the range of applications over which this technique can be used and improve tool die lifetime.