Presidential Faculty Fellows Awards

9553202 Si该项目将在亚利桑那州立大学和摩托罗拉之间建立一个联合研究和教育项目。 该项目将迭代开发和测试基于自适应批评（近似动态规划）和递归神经网络的控制和系统建模的新型通用设计。 对于测试和评估，它将侧重于反应离子蚀刻工艺的建模和运行控制。 将在电气工程课程中开发一门新课程，介绍半导体制造中的基本信号分析和控制应用。

9553202 Si This project will establish a joint research and education program between Arizona State University and Motorola. This project will iteratively develop and test novel general-purpose designs for control and systems modeling, based on adaptive critics (approximate dynamic programming) and recurrent neural networks. For testing and evaluation, it will focus on the modeling and run-to-run control of the Reactive Ion Etching process. A new course will be developed in electrical engineering curriculum on fundamental signal analysis and control applications to semiconductor manufacturing.