National Science Foundation Research Equipment Grant Program: TiNi Sputtering System

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9622283 Carmen This Research Equipment Grant will broaden the scope of the research and education being conducted in Department of Mechanical, Aerospace and Nuclear Engineering at the University of California, Los Angeles. The purchase of an unique sputtering system capable of depositing thin film TiNi onto various substrates is novel & should yield interesting and important results. Developing a dedicated ultra-high-high vacuum this sputtering system in a clean- room facility with lithographic capability will provide a nationally unique facility for thin film research at UCLA. If the sputtering equipment can be controlled so that the chemistry variations are small then the potential for a breakthrough is clearly present. Objectives are well-addressed and the need for such equipment is adequately described. Researchers have an excellent background for the proposed work and have demonstrated considerable productivity. ***