Engineering Research Equipment Grant for Residual Gas Analyzers for Novel Semiconductor Film Growth

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9622282 Sampath The Department of Mechanical Engineering at Colorado State University will purchase a residual gas analyzer (RGA) and the fixturing necessary for installation on our existing vacuum processing equipment. This processing equipment incorporates a unique technology, developed in our laboratory. This technology allows substrates for semiconductor and optical film processing to be transported directly from air into a vacuum environment where film growth can occur then back to air (AVA) with the transportation of substrates taking place in under a second. This novel capability allows very precise control over film growth. Unique processing and growth conditions are possible with the AVA technology. Furthermore, sample processing effort and experimental variability have been greatly decreased.. ***