Engineering Research Equipment Grant for Residual Gas Analyzers for Novel Semiconductor Film Growth
用于新型半导体薄膜生长的残余气体分析仪的工程研究设备补助金
基本信息
- 批准号:9622282
- 负责人:
- 金额:$ 1.42万
- 依托单位:
- 依托单位国家:美国
- 项目类别:Standard Grant
- 财政年份:1996
- 资助国家:美国
- 起止时间:1996-05-15 至 1999-04-30
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
9622282 Sampath The Department of Mechanical Engineering at Colorado State University will purchase a residual gas analyzer (RGA) and the fixturing necessary for installation on our existing vacuum processing equipment. This processing equipment incorporates a unique technology, developed in our laboratory. This technology allows substrates for semiconductor and optical film processing to be transported directly from air into a vacuum environment where film growth can occur then back to air (AVA) with the transportation of substrates taking place in under a second. This novel capability allows very precise control over film growth. Unique processing and growth conditions are possible with the AVA technology. Furthermore, sample processing effort and experimental variability have been greatly decreased.. ***
9622282 Sampath科罗拉多州立大学机械工程系将购买一台残余气体分析仪(RGA)和安装在我们现有真空处理设备上所需的夹具。 该加工设备采用了我们实验室开发的独特技术。 该技术允许将用于半导体和光学膜加工的基板直接从空气输送到真空环境中,在真空环境中可以发生膜生长,然后返回到空气(AVA),基板的输送在一秒钟内发生。 这种新颖的能力允许非常精确地控制薄膜生长。 AVA技术可以提供独特的加工和生长条件。 此外,样品处理工作量和实验变异性已大大减少。 ***
项目成果
期刊论文数量(0)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
数据更新时间:{{ journalArticles.updateTime }}
{{
item.title }}
{{ item.translation_title }}
- DOI:
{{ item.doi }} - 发表时间:
{{ item.publish_year }} - 期刊:
- 影响因子:{{ item.factor }}
- 作者:
{{ item.authors }} - 通讯作者:
{{ item.author }}
数据更新时间:{{ journalArticles.updateTime }}
{{ item.title }}
- 作者:
{{ item.author }}
数据更新时间:{{ monograph.updateTime }}
{{ item.title }}
- 作者:
{{ item.author }}
数据更新时间:{{ sciAawards.updateTime }}
{{ item.title }}
- 作者:
{{ item.author }}
数据更新时间:{{ conferencePapers.updateTime }}
{{ item.title }}
- 作者:
{{ item.author }}
数据更新时间:{{ patent.updateTime }}
Walajabad Sampath其他文献
Walajabad Sampath的其他文献
{{
item.title }}
{{ item.translation_title }}
- DOI:
{{ item.doi }} - 发表时间:
{{ item.publish_year }} - 期刊:
- 影响因子:{{ item.factor }}
- 作者:
{{ item.authors }} - 通讯作者:
{{ item.author }}
{{ truncateString('Walajabad Sampath', 18)}}的其他基金
IUCRC Phase III Colorado State University: Center for a Solar Powered Future (SPF2050)
IUCRC 第三期科罗拉多州立大学:太阳能未来中心 (SPF2050)
- 批准号:
2052735 - 财政年份:2021
- 资助金额:
$ 1.42万 - 项目类别:
Continuing Grant
I/UCRC Phase II at Colorado State University: Center for Next Generation Photovoltaics
科罗拉多州立大学 I/UCRC 二期:下一代光伏中心
- 批准号:
1821526 - 财政年份:2018
- 资助金额:
$ 1.42万 - 项目类别:
Continuing Grant
I/UCRC Phase II: Next Generation Photovoltaics
I/UCRC 第二阶段:下一代光伏发电
- 批准号:
1540007 - 财政年份:2015
- 资助金额:
$ 1.42万 - 项目类别:
Continuing Grant
PFI:AIR-RA: Advanced Thin-Film Photovoltaics for Sustainable Energy
PFI:AIR-RA:用于可持续能源的先进薄膜光伏
- 批准号:
1538733 - 财政年份:2015
- 资助金额:
$ 1.42万 - 项目类别:
Standard Grant
AIR: Next Generation CdTe Photovoltaic Technology
AIR:下一代 CdTe 光伏技术
- 批准号:
1127362 - 财政年份:2011
- 资助金额:
$ 1.42万 - 项目类别:
Standard Grant
I/UCRC for Next Generation Photovoltaics
I/UCRC 下一代光伏发电
- 批准号:
0968987 - 财政年份:2010
- 资助金额:
$ 1.42万 - 项目类别:
Continuing Grant
Planning Grant: I/UCRC for Next Generation Photovoltaics
规划补助金:I/UCRC 下一代光伏发电
- 批准号:
0856034 - 财政年份:2009
- 资助金额:
$ 1.42万 - 项目类别:
Standard Grant
New Technologies for the Environment: Continuous Belt Air to Vacuum to Air (AVA) Technology for Remanufacturing and Recycling in High Technology Industries
环保新技术:用于高科技行业再制造和回收的连续带式空气真空空气 (AVA) 技术
- 批准号:
0086666 - 财政年份:2000
- 资助金额:
$ 1.42万 - 项目类别:
Standard Grant
Continuous Air to Vacuum to Air (AVA) High Throughput Vacuum Deposition of Thin Films
连续空气到真空到空气 (AVA) 高通量薄膜真空沉积
- 批准号:
9713699 - 财政年份:1997
- 资助金额:
$ 1.42万 - 项目类别:
Continuing Grant
High Throughput Vacuum Desposition of Thin Films
薄膜的高通量真空沉积
- 批准号:
9412919 - 财政年份:1994
- 资助金额:
$ 1.42万 - 项目类别:
Continuing Grant
相似国自然基金
Research on Quantum Field Theory without a Lagrangian Description
- 批准号:24ZR1403900
- 批准年份:2024
- 资助金额:0.0 万元
- 项目类别:省市级项目
Cell Research
- 批准号:31224802
- 批准年份:2012
- 资助金额:24.0 万元
- 项目类别:专项基金项目
Cell Research
- 批准号:31024804
- 批准年份:2010
- 资助金额:24.0 万元
- 项目类别:专项基金项目
Cell Research (细胞研究)
- 批准号:30824808
- 批准年份:2008
- 资助金额:24.0 万元
- 项目类别:专项基金项目
Research on the Rapid Growth Mechanism of KDP Crystal
- 批准号:10774081
- 批准年份:2007
- 资助金额:45.0 万元
- 项目类别:面上项目
相似海外基金
Equipment: MRI: Track 1 Acquisition of a Digital Real-Time Simulator to Enhance Research and Student Research Training in Next-Generation Engineering and Computer Science
设备: MRI:轨道 1 采购数字实时模拟器,以加强下一代工程和计算机科学的研究和学生研究培训
- 批准号:
2320619 - 财政年份:2023
- 资助金额:
$ 1.42万 - 项目类别:
Standard Grant
Equipment: MRI: Track 1 Acquisition of an X-ray Photoelectron Spectroscopy Instrument for Materials Research in Science and Engineering
设备: MRI:轨道 1 采购用于科学与工程材料研究的 X 射线光电子能谱仪器
- 批准号:
2320031 - 财政年份:2023
- 资助金额:
$ 1.42万 - 项目类别:
Standard Grant
MRI: Acquisition of Automatic Test Equipment to Enhance Research and Research Training in Engineering and Computer Science at San Francisco State University
MRI:采购自动测试设备以加强旧金山州立大学工程和计算机科学领域的研究和研究培训
- 批准号:
2018728 - 财政年份:2020
- 资助金额:
$ 1.42万 - 项目类别:
Standard Grant
QMUL EPSRC Core Equipment Bid: Q-Arena - a multidisciplinary research environment for human-centred robotics and interactive engineering
QMUL EPSRC 核心设备投标:Q-Arena - 以人为本的机器人和交互式工程的多学科研究环境
- 批准号:
EP/V035304/1 - 财政年份:2020
- 资助金额:
$ 1.42万 - 项目类别:
Research Grant
MRI: Development of a Miniature, High Temperature, Multiaxial Testing Equipment for Advanced Materials and Engineering Research
MRI:开发用于先进材料和工程研究的微型高温多轴测试设备
- 批准号:
1337952 - 财政年份:2013
- 资助金额:
$ 1.42万 - 项目类别:
Standard Grant
MRI: Acquisition of Mechanical Testing Equipment to Support Musculoskeletal Research and Engineering Education
MRI:采购机械测试设备以支持肌肉骨骼研究和工程教育
- 批准号:
1039524 - 财政年份:2011
- 资助金额:
$ 1.42万 - 项目类别:
Standard Grant
Thin Sectioning Equipment for Multi-Disciplinary Research in Engineering and the Geosciences
用于工程和地球科学多学科研究的薄切片设备
- 批准号:
EP/F027117/1 - 财政年份:2008
- 资助金额:
$ 1.42万 - 项目类别:
Research Grant
MRI: Acquisition of Processing and Testing Equipment for the Integration of Materials Science and Engineering Research at the University of Puerto Rico at Mayaguez
MRI:波多黎各大学马亚圭斯分校采购处理和测试设备,用于整合材料科学和工程研究
- 批准号:
0722534 - 财政年份:2007
- 资助金额:
$ 1.42万 - 项目类别:
Standard Grant
Replacement Laser for the Optical Engineering Research Group (Equipment for Multiple Projects Proposal)
光学工程研究组的替代激光器(多个项目提案的设备)
- 批准号:
EP/E032990/1 - 财政年份:2007
- 资助金额:
$ 1.42万 - 项目类别:
Research Grant
Equipment for studying locomotion to be used in animal biomechanics animal welfare developmental biology and engineering research
用于动物生物力学、动物福利、发育生物学和工程研究的运动研究设备
- 批准号:
BB/E013244/1 - 财政年份:2007
- 资助金额:
$ 1.42万 - 项目类别:
Research Grant