Investigation of atmospheric pressure filamentary discharges and its application for film deposition on inner surface of tubes, cavities and flat surfaces

在FOR1123第一阶段已研制出一种新的等离子体源，用于在长细管内和常压条件下在表面沉积薄膜。显影等离子体可以在被驱动电极和接地电极之间的引导型等离子体和电极外的子弹状等离子体中分离。在含有少量甲烷混合物的Ar中引出的放电在被涂覆的管内被点燃。在先导区的管内沉积了质量良好的非晶态碳膜。在接地区域下，领导者变成了子弹排放者。利用最近发表的一种方法，用定量的OES表征了领头人等离子体。在此基础上，建立了等离子体化学模型。在项目的下一阶段，我们将：1)将我们的OES方法与Talif和吸收光谱方法进行比较，2)研究引导器到子弹放电时间和空间分辨率的转换，3)分析子弹放电，4)评估阶梯引导器放电的着火和引导器放电的分支。进一步，在更多的技术方面，我们将研究1)使用可移动接地电极的长管的均匀沉积，2)多个管的同时沉积，以及3)有腔和无腔表面的均匀沉积。

A new plasma source for thin film deposition inside long thin tubes as well as on at surfaces at atmospheric pressure conditions has been developed in the first phase of the FOR 1123. The developing plasma may be separated in a leader-type plasma between the driven and the grounded electrode and a bullet-like outside the electrodes. Leader discharges in argon with small methane admixture are ignited inside the tube to be coated. Amorphous carbon films with good quality are deposited inside the tube within the leader region. Under the grounded area, the leader is transformed to a bullet-discharge. The leader plasma has been characterized by quantitative OES using a recently published method. On this basis, a plasma chemical model has been developed. In the next phase of the project we will: 1) compare our OES method with TALIF and absorption spectroscopy, 2) investigate the transformation of leader to bullet discharge time and space resolved, 3) analyze the bullet discharge and 4) evaluate the ignition of stepped leader discharge, the branching of leader discharge. Further on, under more technological aspects we will investigate 1) the homogenous deposition of long tubes using movable grounded electrodes, 2) of several tubes simultaneously and 3) of at surfaces with and without cavities.