SBIR Phase I: Frequency-Quadrupled Diode Laser Atomic Absorption-Based Flux Controller

*摘要9661283凯斯勒这个小型企业创新研究第一阶段项目将结合超灵敏光学吸收光谱和四倍频半导体激光光源，开发用于半导体制造的原子质量流量传感器。日益复杂的纳米级电子器件要求生产设备在制造过程中(如MBE、CVD)保持对原子和分子通量的精细控制。这就需要开发一种新的流量监测器，这种监测器因物种而异，能够达到沉积单个原子层所需的精密度和准确度。物理科学公司(PSI)最近通过记录分子氧分子在航空推进领域中的速度和数密度测量，展示了灵敏的质量通量测量。PSI建议将同样的技术应用于原子物种，开发和演示一种紧凑和可调谐的、适用于各种原子通量测量的四倍频半导体激光光源。在第一阶段计划中，将使用热管原子源演示超灵敏掺杂原子浓度测量。质量通量测量和控制将在第二阶段演示由MBE炉源产生的原子流。通量传感器/控制器原型演示将适用于各种原子和分子物种的通量测量。所提出的传感器将推动电子器件制造过程中原子质量通量控制的最先进水平。通过改变激光光源波长，该传感器也将适用于分子物种，因此将适用于分子束外延变体和MOCVD制造。在工业过程控制、航空推进应用和环境监测方面可能会发现更多的市场。***

*** ABSTRACT 9661283 Kessler This Small Business Innovation Research Phase I project will combine ultra-sensitive optical absorption spectroscopy and frequency-quadrupled diode laser light sources for the development of an atomic mass flux sensor for semiconductor fabrication. Increasingly complex nanoscale electronic devices require that production facilities maintain fine control of the atomic and molecular fluxes during the fabrication process (e.g., MBE, CVD). This requires the development of a new class of flux monitors which are species specific and capable of the precision and accuracy needed for depositing single atomic layers. Physical Sciences Inc. (PSI) has recently demonstrated sensitive mass flux measurements by recording velocity and number density measurements of molecular oxygen molecules in an aeropropulsion field demonstration. PSI proposes to apply the same technique to atomic species by developing and demonstrating a frequency-quadrupled diode laser source in a compact and tunable configuration suitable for various atomic flux measurements. During the Phase I program, ultra-sensitive dopant atomic concentration measurements will be demonstrated using a heat pipe atom source. Mass flux measurements and control will be demonstrated in Phase II in atomic flows produced by an MBE oven source. The flux sensor/controller prototype demonstration will be applicable to a wide variety of both atomic and molecular species flux measurements. The proposed sensor will advance the state-of-the-art for the control of atomic mass flux during fabrication of electronic devices. The sensor will also be applicable to molecular species by changing the laser source wavelength and thus will be applicable to MBE variants and manufacturing via MOCVD. Additional markets may be found in industrial process controls, aeropropulsion applications, and environmental monitoring. ***