CAREER: Non-Integrated Circuits Micro-Manufacturing: Integrated Research and Education
CAREER: Non-Integrated Circuits Micro-Manufacturing: Integrated Research and Education
批准号:
9703426
负责人:
Xiang Zhang
金额:
$25.5万
依托单位国家:
美国
项目类别:
Continuing Grant
财政年份:
1997
资助国家:
美国
项目状态:
已结题
起止时间:
1997-07-01 至 2001-08-31
中文摘要
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英文摘要
9703426 Zhang Microelectromechanical System (MEMS) presents a challenge in fabrication of truly three-dimensional (3D) and high aspect ration microstructures. Conventional IC-based approaches can not deliver a feasible solution to this challenge due to its planar nature. This research project studies a novel non-IC laser-based technology for 3D high aspect ration microstructures through micromachining. A novel doping technique to achieve ultra-shallow micromachining of 10-20nm in depth for CD-ROM will be investigated. The outcomes of the research could generate an array of opportunities in the areas of optical data storage and bio-medical engineering. The research activities will be balanced by an education plan to improve the quality of graduate and undergraduate education at the Pennsylvania State University.
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批准号:2341000
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项目类别:Standard Grant
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资助金额:$60.0万
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负责人:Xiang Zhang
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项目类别:Standard Grant
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负责人:Xiang Zhang
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依托单位:
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批准号:2114822
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项目类别:Standard Grant
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负责人:Xiang Zhang
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批准号:1753380
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项目类别:Standard Grant
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资助金额:$10.0万
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依托单位:
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批准号:1725335
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项目类别:Standard Grant
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依托单位:
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批准号:1707548
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项目类别:Continuing Grant
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资助金额:$49.92万
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负责人:Xiang Zhang
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依托单位:
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项目类别:Continuing Grant
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负责人:Xiang Zhang
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依托单位:
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项目类别:Standard Grant
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财政年份:2016
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负责人:Xiang Zhang
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负责人:Xiang Zhang
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Materials World Network: Classical and Quantum Optical Metamaterials by Combining Top-down and Bottom-up Fabrication Techniques
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批准号:1210170
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项目类别:Standard Grant
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负责人:Xiang Zhang
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依托单位:
III: Medium: Collaborative Research: Toward Robust and Scalable Discovering of Significant Associations in Massive Genetic Data
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项目类别:Standard Grant
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项目类别:Standard Grant
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财政年份:2012
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负责人:Xiang Zhang
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依托单位:
NSEC: Center for Scalable and Integrated Nanomanufacturing (SINAM)
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批准号:0751621
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项目类别:Cooperative Agreement
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资助金额:$1765.82万
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财政年份:2008
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负责人:Xiang Zhang
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依托单位:
SST/Collaborative Research: Self-Supporting Wireless Sensor Networks for In-Process and In-Service Integrity Monitoring Using High Energy-Harvesting Nonlinear Modeling Principles
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批准号:0427679
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项目类别:Standard Grant
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资助金额:$18.62万
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财政年份:2004
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负责人:Xiang Zhang
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依托单位:
Development of Novel 3D Nano Lithography: Fundamental Investigations and Applications
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批准号:0455698
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项目类别:Standard Grant
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资助金额:$20.34万
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财政年份:2004
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负责人:Xiang Zhang
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依托单位:
NSEC: Center for Scalable and Integrated Nano Manufacturing (SINAM)
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批准号:0327077
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项目类别:Cooperative Agreement
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资助金额:$0.0万
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财政年份:2003
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负责人:Xiang Zhang
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依托单位:
MRI: 3D Nano Manufacturing of Novel Photonic Structures
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批准号:0216423
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项目类别:Standard Grant
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资助金额:$36.0万
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财政年份:2002
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负责人:Xiang Zhang
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依托单位:
Development of Novel 3D Nano Lithography: Fundamental Investigations and Applications
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批准号:0218273
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项目类别:Standard Grant
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资助金额:$25.0万
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财政年份:2002
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负责人:Xiang Zhang
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依托单位:
CAREER: Non-Integrated Circuits Micro-Manufacturing: Integrated Research and Education
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批准号:0196395
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项目类别:Continuing Grant
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资助金额:$25.5万
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财政年份:2000
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负责人:Xiang Zhang
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依托单位:
国内基金
海外基金
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