课题基金 / 基金详情

CAREER: Non-Integrated Circuits Micro-Manufacturing: Integrated Research and Education

CAREER: Non-Integrated Circuits Micro-Manufacturing: Integrated Research and Education
职业:非集成电路微制造:综合研究和教育
批准号:
9703426
负责人:
Xiang Zhang
金额:
$25.5万
依托单位国家:
美国
项目类别:
Continuing Grant
财政年份:
1997
资助国家:
美国
项目状态:
已结题
起止时间:
1997-07-01 至 2001-08-31

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中文摘要
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英文摘要
9703426 Zhang Microelectromechanical System (MEMS) presents a challenge in fabrication of truly three-dimensional (3D) and high aspect ration microstructures. Conventional IC-based approaches can not deliver a feasible solution to this challenge due to its planar nature. This research project studies a novel non-IC laser-based technology for 3D high aspect ration microstructures through micromachining. A novel doping technique to achieve ultra-shallow micromachining of 10-20nm in depth for CD-ROM will be investigated. The outcomes of the research could generate an array of opportunities in the areas of optical data storage and bio-medical engineering. The research activities will be balanced by an education plan to improve the quality of graduate and undergraduate education at the Pennsylvania State University.
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