Development of Novel 3D Nano Lithography: Fundamental Investigations and Applications

本项目拟开发两种新型纳米立体光刻技术：双光子纳米光刻技术和分辨率低至50nm的近场纳米光刻技术。这两种方法都有望实现具有计算机辅助设计/建模能力的3D纳米制造。初步数值模拟结果表明，采用近场非相干光致发光技术可以实现低至60 nm的空间分辨率。诸如电力控制纳米立体光刻等技术将被研究和应用，以进一步提高光刻分辨率。通过该项目，不仅将开发新的nSL工艺，而且还将研究纳米立体光刻的有趣基本机制，以加强我们对分子尺度光子-材料相互作用的基础科学的理解，例如自聚焦，自由基扩散，热输运和粘性效应，以及它们对分辨率的影响。在nSL技术发展成功后，一套特定的纳米器件将被设计和制造。本项目开发的可行的三维纳米制造技术及其应用将对从生物医学诊断到光通信的人类社会产生重要影响。研究成果也将有利于美国新兴的高科技产业与国外竞争。这个项目的另一个重要方面是通过暑期本科生研究将研究和教育结合起来。凭借扎实的知识，先进的技术和创新的理念，学生，特别是少数民族和女性学生将准备好在纳米制造领域服务于行业需求。

The project is to develop two innovative nano-stereo lithography (nSL) techniques: two-photon nSL and near-field nSL with the resolution down to 50nm. Both methods promise 3D nanofabrications with computer-aided design/modeling capabilities. Preliminary numerical simulations suggest that a spatial resolution down to 60 nm can be achieved with near-field nSL. Techniques, such as electrical force controlled nano stereo lithography, will be investigated and employed to further enhance lithography resolutions. Through this project, not only novel nSL processes will be developed, but intriguing fundamental mechanisms of nano-stereo-lithography will also be studied to intensify our understanding on fundamental science on molecular-scale photon-material interactions, for instance self-focusing, radical diffusion, thermal transport and viscous effects, and their influences on the resolution. Upon the success of the development of proposed nSL techniques, a set of specific nano devices will be designed and fabricated. Viable three dimensional nanomanufacturing technologies and its applications developed in this project will have important impacts in human society from biomedical diagnostics to optical communications. The research outcome will also benefit the emerging high technology industries in United States in competition with foreign countries. Another important aspect of this proposed project is the integration of research and edcuation through summer undergraduate research. Armed with solid knowledgements, state-of-art techniques and innovative ideas, students, especially minority and women students will be ready to serve industry needs in the nanomanufacturing arena.