GOALI: Development of a Cs Electrohydrodynamic Ion Source for High Spatial Resolution Secondary Ion Mass Spectrometry

建议编号：ECS-9705679首席研究员：乔恩·奥尔洛夫标题：开发用于高空间分辨率二次离子质谱仪的Cs电流体动力源在这项研究中，根据美国国家科学基金会的目标计划，将开发一种用于二次离子质谱仪(SIMS)系统的离子源。离子源将以铯液态金属材料为基础，在强电场存在的情况下，通过液态金属外壳与钝场发射器固体尖端之间的相互作用来发射离子。我们将研究各种含溴、碘、氯和氧的铯化合物。预计该源将克服目前SIMS离子源的主要限制，因为它将是高亮度和高分辨率(0.1微米)。目前基于铯的光源只有大约1微米的宽分辨率；镓光源具有高分辨率，但亮度太低，以至于它们在分光计系统中的使用受到限制。高亮度、高空间分辨率的离子源和光谱仪将在微电子工业中有许多应用，用于尺寸小于0.25微米的电路的直接表面分析。

Proposal Number: ECS-9705679 Principal Investigator: Jon Orloff Title: Development of a Cs electrohydrodynamic source for high spatial resolution secondary ion mass spectroscopy In this research, pursued under the NSF GOALI Program, an ion source for use in a secondary ion mass spectrometer (SIMS) system will be developed. The ion source will be based on cesium liquid metal materials, with ion emission through interaction of the liquid metal skin over a blunt field emitter solid tip in the presence of an intense electric field. A variety of cesium compounds that contain bromine, iodine and chlorine as well as oxygen will be studied. The source is expected to overcome the major limitations of present SIMS ion sources, in that it will be both high brightness and high resolution (0.1 micron). Current cesium-based sources only have a broad resolution of about one micron; gallium sources have high resolution but such low brightness that their use in a spectrometer system is limited. A high brightness, high spatial resolution ion source and spectrometer would have many applications in the microelectronics industry for direct surface analysis of circuits with dimensions of less than 0.25 microns.