POWRE: Microstructural, Optical and Electrical Properties of Thin Film Silica Aerogels as a Function of Processing Method

薄膜二氧化硅气凝胶的微观结构、光学和电学性能作为加工方法的函数二氧化硅气凝胶是通过溶胶-凝胶加工制备的高多孔（通常为75%）材料，具有独特的形貌，具有优异的热、声、机械和电学性能。虽然体气凝胶已经被广泛研究，但薄膜气凝胶的研究还没有达到任何重要的程度，并有望在许多电和热应用中产生重大影响。在这项研究中，Broadbridge教授将重点研究薄膜二氧化硅气凝胶在集成电路技术中作为低k层间介电体的应用。PI将参与三一学院和布朗大学的合作研究。提供的资金将影响三一学院的学生，使本科生接触到最先进的工程研究努力的挑战。这笔资金也有望为Broadbridge博士提供与布朗大学建立长期研究关系的机会，从而使她能够建立一个重要的综合研究和教育计划。

9753096 PI : Broadbridge Institution : Trinity College Microstructural, Optical and Electrical Properties of Thin Film Silica Aerogels as a Function of Processing Method Silica aerogels, prepared by sol-gel processing, are highly porous (typically 75%) materials with unique morphology, resulting in exceptional thermal, acoustic, mechanical and electrical properties. While bulk aerogels have been studied extensively, thin film aerogels have not been studied to any significant extent, and promise significant impact in a number of electrical and thermal applications. In this study, Prof. Broadbridge will focus on the application of thin-film silica aerogels as low-k interlayer dielectrics with potential utilisation in intergrated circuit technology. The PI will engage in a collaborative research endeavor at Trinity College and Brown University. Funding provided will impact students at Trinity College, exposing undergraduates to the challenges of state-of-the-art engineering research endeavors. This funding is also expected to provide Dr. Broadbridge with opportunity to forge a long-lasting research relationship with Brown University, thereby allowing her to establish a significant integrated research and education program.