SBIR Phase II: Ambient Temperature Chloroaluminate Ionic Liquids for Preparation of Precursors to III-V Ceramic Materials

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This Small Business Innovation Research (SBIR) Phase II project addresses a general method for production of high purity precursors to III-V ceramic materials, exemplified by aluminum nitride. These materials are increasing in importance for applications in microelectronic packaging, optoelectronic devices and wear or chemical resistant surface coatings. Phase II will develop a generalized homogeneous chemical route to bulk quantities of stable precursors for diverse applications. This route will lower the cost of final materials by diversifying the base of applications. The proposed approach will exploit unique chemistry of ambient temperature chloroaluminate ionic liquids to generate ultrahigh purity precursors to aluminum nitride by a mild, room temperature route. Routes will be developed for production of volatile precursors for chemical vapor deposition of surface coatings and nonvolatile precursors for preparation of powders. The chemistry of the ionic liquid will allow different precursors to be prepared from a unified process, using reactants that do not introduce carbon or oxygen impurities into the final materials. The proposed process will produce bulk quantities of stable, ultrahigh purity chemical precursors to III-V ceramics. These materials will be useful for ceramic coatings, bulk materials for microelectronic circuit substrates, optoelectronic components and advanced protective coatings for the aerospace industry.