SBIR Phase I: Silicon Avalanche Detector Arrays with Wide Spectral Response

这个小企业创新研究第一阶段项目将展示新技术的可行性，该技术将允许制造硅雪崩光电二极管（APD）阵列，该阵列可用于x射线，带电粒子和光学成像，在光谱的深红色端（即在1，um时为60%）和光谱的紫色端具有更高的量子效率。提出的设计是基于一种改进的伸通结构。在光谱的紫色端，带电粒子和光子的改进将来自使用一种新的超浅结技术。x射线和光子在光谱深红端的改进将来自改进的结构和具有超高电阻率和优良的少数载流子寿命的n型Si。噪声和像素隔离的改进将来自结边钝化的新技术。雪崩增益和增益均匀性的改进将来自于制造雪崩区的改进技术。在第一阶段，我们希望通过证明我们可以保持n型Si所需的特性，并通过证明我们可以提供足以接受像素隔离的表面钝化来证明可行性。Si APD和APD阵列有许多商业和潜在的商业市场，从简单的激光探测，通过更换闪烁探测器的光倍增管，到低能x射线探测和光谱。一项提高频谱覆盖范围并使扩展阵列成为可能的技术将对现有市场产生重大影响，并创造新的市场潜力。

9860160 This Small Business Innovation Research Phase I project will show the feasibility of new technology that will allow the fabrication of silicon avalanche photodiode (APD) arrays which can be used for x-ray, charged particle, and optical imaging with improved quantum efficiency at the deep red end of the spectrum (i.e., 60% at 1, um) and at the violet end of the spectrum. The proposed design is based on a modified reach through structure. Improvements for charged particles and photons at the violet end of the spectrum will come from using a new ultra-shallow junction technology. Improvements for x-rays and photons at the deep red end of the spectrum will come from improved configuration and n-type Si with ultra-high resistivity and excellent minority carrier lifetime. Improvements in noise and pixel isolation will come from new technology for junction edge passivation. Improvements in avalanche gain and gain uniformity will come from improved techniques for fabricating the avalanche zone. In Phase I, we expect to prove feasibility by showing that we can maintain the required properties of the n-type Si and by demonstrating that we can provide surface passivation adequate for acceptable pixel isolation. There are many commercial and potential commercial markets for Si APDs and APD arrays ranging from simple laser detection, through replacement of photo multiplier tubes for scintillation detectors, to low energy x-ray detection and spectroscopy. A technology which improves the spectral coverage and makes extended arrays possible will heavily impact existing markets as well as creating new market potential.