MRI: Integrated Crystal Growth and Wafer Manufacture Facility

MRI：集成晶体生长和晶圆制造设施

• 批准号: 9871152
• 负责人: David Larson
• 金额: $ 49.89万
• 依托单位: SUNY at Stony Brook
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1998
• 资助国家: 美国
• 起止时间: 1998-08-15 至 2001-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9871152&HistoricalAwards=false
• 关键词: MRI; Integrated; Crystal; Growth; Wafer

This major research instrumentation (MRI) grant provides funding for setting up a state-of-the-art, integrated crystal growth and wafer manufacture research facility at the State University of New York at Stony Brook, which will comprise crystal growth, substrate manufacturing, material characterization, thermo-optical measurements and process modeling laboratories. The major instrumentation to be acquired through this grant includes: the next generation high pressure Czochralski crystal growth system with provisions for in-situ synthesis of compound materials as well as an applied magnetic field; a multizone modified Bridgman furnace with advanced instrumentation; an inner diameter wafering saw; a chemo-mechanical polishing apparatus; and a 2-axis/3-axis x-ray characterization instrument. They will add to the university's existing facilities for experiments, process modeling and virtual prototyping. These facilities will help to broaden the talent base available to address specific problems in the field of crystal growth and wafer manufacturing, and provide access to highly specialized and costly facilities that would be otherwise unavailable. The MRI grant will help in further expanding the university's research efforts in both basic and applied sciences, provide a focus to attract more industrial participation, and help in developing a better academic and research environment in this field. With the support of MRI funds, Stony Brook will be able to establish an integrated experimental and theoretical, industry/university/federal laboratory research program for semiconductor processing at the pre-device level that is non-existent in the country. It will allow validation of numerical models that cannot be accomplished without conducting carefully-designed experiments for a wide range of parameters, feasibility study of new concepts, design verification, and test of model-based feed-forward control algorithms. It will also serve as a clinic to which industry can visit for intellectual support, theoretical modeling and experimental testing. Research on both elemental and compound materials will be pursued with results directly applicable to electronics, opto-electronics, laser-based devices, photovoltaics, sensors and micro-electromechanical systems (MEMS).

这项主要的研究仪器（MRI）赠款为在斯托尼布鲁克的纽约州立大学建立一个最先进的综合晶体生长和晶片制造研究设施提供资金，该设施将包括晶体生长、衬底制造、材料特性、热光学测量和工艺模拟实验室。主要仪器将获得通过这项赠款包括：下一代高压直拉晶体生长系统的规定，在原位合成的化合物材料以及施加磁场;多区修改布里奇曼炉先进仪器;内径切片锯;化学机械抛光设备;和2轴/3轴X射线表征仪器。他们将增加大学现有的实验设施，过程建模和虚拟原型。这些设施将有助于扩大现有的人才基础，以解决晶体生长和晶片制造领域的具体问题，并提供使用高度专业化和昂贵的设施的机会，否则将无法获得。MRI赠款将有助于进一步扩大该大学在基础科学和应用科学方面的研究工作，提供一个重点，以吸引更多的工业参与，并有助于在这一领域发展更好的学术和研究环境。 在MRI基金的支持下，斯托尼布鲁克将能够建立一个综合的实验和理论，工业/大学/联邦实验室的半导体加工研究计划，在前设备的水平，是不存在的国家。它将允许验证数字模型，如果不进行精心设计的实验，就无法完成广泛的参数，新概念的可行性研究，设计验证和基于模型的前馈控制算法的测试。它还将作为一个诊所，行业可以访问该诊所以获得智力支持、理论建模和实验测试。对元素和化合物材料的研究将继续进行，其结果直接适用于电子学，光电子学，激光器件，光电子学，传感器和微机电系统（MEMS）。