Synthesis of Nanostructured Films for Friction and Wear Resistance

这个项目的目标是开发和研究用于摩擦和耐磨的纳米结构薄膜的合成方法。该奖项是根据纳米技术倡议伙伴关系颁发的。这项研究将包括两个相关的方法，一个涉及连续薄膜的高速沉积，另一个涉及图案化薄膜的高清晰度沉积。高速沉积将使用高超声速等离子体粒子沉积(HPPD)，目的是通过更好地了解操作参数及其对薄膜性能的影响，将HPPD开发为一种稳健、可靠的工艺。为了证明气动聚焦沉积尺寸选定的纳米粒子以制备用于摩擦和磨损应用的图案化薄膜的可行性，将使用一种新型的粒子束质谱仪对该过程进行实验监测。这项研究包括建立数值模型来模拟等离子体的流动和温度分布、喷嘴中粒子的成核和生长以及粒子在薄膜衬底上的高超声速沉积。预计这项纳米技术研究的影响将对汽车行业高速加工应用的商业可行性以及MEMS行业的图案化纳米结构沉积至关重要。

9871863Girshick The object of this project is to develop and study methods for the synthesis of nanostructured films for friction and wear resistance. This award is made under the Partnership for Nanotechnology Initiative. The research will consist of two related approaches, one involving high-rate deposition of continuous films, the other involving high-definition deposition of patterned films. The high-rate deposition will be achieved using Hypersonic Plasma Particle Deposition (HPPD), with the objective of developing HPPD as a robust, reliable process through an improved understanding of the operating parameters and their effects upon the film properties. In order to demonstrate the feasibility of aerodynamic focusing for the deposition of size-selected nanoparticles to produce patterned thin films for friction and wear applications such as the Microelectromechanical Systems (MEMS), experimental monitoring of the process using a new particle beam mass spectrometer will be conducted. This research includes the development of numerical models to simulate the plasma flow and temperature distribution, particle nucleation and growth in the nozzle, and hypersonic deposition of the particles on the film substrate. The impact of this nanotechnology research is expected to be crucial for commercial viability for high-rate processing applications in the automotive industry, and for patterned nanostructure deposition for the MEMS industry.