Automated Extraction for Structured Design of MEMS Devices

微电子机械系统(MEMS)技术已经显示出批量制造微米级传感器和执行器系统的能力。稳定的MEMS制造工艺的可用性增加了MEMS设计的复杂性，并突显了对CAD工具的需求，以帮助进行设计验证。该项目正在开发设计验证所需的MEMS元件和组件的自动提取算法。这些算法依赖于(1)几何信息来分析各种机械部件的形状、大小和连通性；(2)基于材料强度的估计来评估各种部件的相对刚度(3)与电子接口的连通性来识别各种机械部件的功能。这项研究调查了以下几点。确定适合与电子元件的现有表示法交互的机械元件表示法。评估从空间表示导出的模拟模型的效率。探索在提取算法中权衡模拟效率和模拟精度的方法。在各种MEMS器件的提取算法中找到可靠的保证。

Micro-electro-mechanical Systems (MEMS) technology has demonstrated the capability of batch fabricating micron-sized sensor and actuator systems. The availability of stable MEMS fabrication processes has fueled an increase in MEMS design complexity, and highlighted the need for CAD tools to aid in design verification. This project is developing algorithms for automated extraction of MEMS elements and components needed for design verification. These algorithms rely on (1) geometric information to analyze shapes, size, and connectivity of various mechanical elements; (2) strength of material based estimations to assess relative stiffness of various components (3) connectivity with electronic interface to identify functionality of various mechanical components. This research investigates the following. Determining mechanical component representations that are suitable for interfacing with existing representations of electronic components. Evaluating the efficiency of simulation models derived from a spatial representation. Exploring approaches to trade-off simulation efficiency versus simulation accuracy in extraction algorithms. Finding soundness guarantees in the extraction algorithms for a wide variety of MEMS devices.