Establishment of a 2-D/3-D Micro/Nano-Scale Device Fabrication Facility at The University of Kentucky

在肯塔基大学建立 2-D/3-D 微/纳米器件制造设施

• 批准号: 0083116
• 负责人: Vijay Singh
• 金额: $ 50万
• 依托单位: University of Kentucky Research Foundation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-07-15 至 2002-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0083116&HistoricalAwards=false
• 关键词: Establishment; Micro; Nano; Scale; Device

This project, building upon and seeking to substantially accelerate the recently established momentum in nano and microscale research at the University of Kentucky, enhances the device fabrication capabilities to include clean room, MEMS fabrication, chip processing and microscale package integration or connection to macroscale devices. Added to a Class 10 Clean Room funded by the state, and to the LIGA microfabrication and testing equipment provided by DARPA, the several key pieces of device fabrication equipment enabled by this award contribute to establish an advanced micro/nano-scale fabrication facility, capable of making both 2-D and 3-D structures. The microdevice-MEMS fabrication facility will support and strengthen multiple ongoing research projects, facilitating synergistic multi-disciplinary research. The project blends the skills of the Electrical, Mechanical, Chemical, and Materials Engineering Departments with those of the Chemistry and Physics Departments. Thirty-two faculty members have identified on-going research projects that will be significantly strengthened. This project substantially bolsters state capabilities for fabrication of the sensing 2-D microdevices, and interfacing/ packaging technologies by enhancing the capability to fabricate 2-D and 3-D micro/nano scale device assemblies from silicon, ceramics, and metals; thus, complete systems may be fabricated, encompassing integrated circuit micro-systems interfaced with macro scaled components such as pumps, heat sinks, etc. that are able to operate in harsh industrial or biomedical environments. Optimizing finite state resources, the Device Fabrication Facility will be open to all state researchers. The infrastructure fosters collaborations with regional industries that require robust microdevices in their manufacturing processes, providing the basis for enhanced economic development and growth in the state. The work also contributes to enhance the educational experience of a substantial number of students.

该项目基于并寻求实质上加速肯塔基大学Nano和Microscale Research最近建立的动力，增强了设备的制造能力，包括清洁室，MEMS制造，芯片处理和微观套件包装或与Moccoscale设备的连接。 还增加了由国家资助的10级清洁室，以及由DARPA提供的LIGA微加工和测试设备，该奖项启用的几个关键设备制造设备的几个关键部分有助于建立高级的微型/纳米规模制造设备，能够同时制造2-D和3-D结构。 Microdevice-MEMS制造设施将支持和加强正在进行的多个正在进行的研究项目，从而促进协同的多学科研究。 该项目将电气，机械，化学和材料工程部门的技能与化学和物理部门的技能融合在一起。 32名教职员工已经确定了正在进行的研究项目，这些项目将得到显着加强。 该项目实质上可以通过增强从硅，陶瓷和金属制造的2-D和3-D微米/纳米尺度设备组件来增强制造2-D和3-D微/纳米尺度设备组件的能力来实质性地制造感应2-D微型电视的能力以及接口/包装技术；因此，可以制造完整的系统，涵盖与宏观缩放组件相连的集成电路微型系统，例如泵，散热器等，它们能够在恶劣的工业或生物医学环境中运行。 优化有限国家资源，设备制造设施将向所有国家研究人员开放。 基础设施促进了与区域行业的合作，这些行业需要在其制造过程中进行牢固的微观问题，从而为增强了该州的经济发展和增长提供了基础。 这项工作还有助于增强大量学生的教育经验。