Establishment of a 2-D/3-D Micro/Nano-Scale Device Fabrication Facility at The University of Kentucky

在肯塔基大学建立 2-D/3-D 微/纳米器件制造设施

• 批准号: 0083116
• 负责人: Vijay Singh
• 金额: $ 50万
• 依托单位: University of Kentucky Research Foundation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-07-15 至 2002-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0083116&HistoricalAwards=false
• 关键词: Establishment; Micro; Nano; Scale; Device

This project, building upon and seeking to substantially accelerate the recently established momentum in nano and microscale research at the University of Kentucky, enhances the device fabrication capabilities to include clean room, MEMS fabrication, chip processing and microscale package integration or connection to macroscale devices. Added to a Class 10 Clean Room funded by the state, and to the LIGA microfabrication and testing equipment provided by DARPA, the several key pieces of device fabrication equipment enabled by this award contribute to establish an advanced micro/nano-scale fabrication facility, capable of making both 2-D and 3-D structures. The microdevice-MEMS fabrication facility will support and strengthen multiple ongoing research projects, facilitating synergistic multi-disciplinary research. The project blends the skills of the Electrical, Mechanical, Chemical, and Materials Engineering Departments with those of the Chemistry and Physics Departments. Thirty-two faculty members have identified on-going research projects that will be significantly strengthened. This project substantially bolsters state capabilities for fabrication of the sensing 2-D microdevices, and interfacing/ packaging technologies by enhancing the capability to fabricate 2-D and 3-D micro/nano scale device assemblies from silicon, ceramics, and metals; thus, complete systems may be fabricated, encompassing integrated circuit micro-systems interfaced with macro scaled components such as pumps, heat sinks, etc. that are able to operate in harsh industrial or biomedical environments. Optimizing finite state resources, the Device Fabrication Facility will be open to all state researchers. The infrastructure fosters collaborations with regional industries that require robust microdevices in their manufacturing processes, providing the basis for enhanced economic development and growth in the state. The work also contributes to enhance the educational experience of a substantial number of students.

该项目建立在肯塔基州大学纳米和微米级研究的基础上，并寻求大幅加速最近建立的势头，增强了设备制造能力，包括洁净室，MEMS制造，芯片加工和微米级封装集成或连接到宏观器件。 除了国家资助的10级洁净室，以及DARPA提供的LIGA微加工和测试设备外，该奖项所支持的几个关键器件制造设备有助于建立先进的微/纳米级制造设施，能够制造2D和3D结构。 微器件MEMS制造设施将支持和加强多个正在进行的研究项目，促进协同多学科研究。 该项目将电气，机械，化学和材料工程部门的技能与化学和物理部门的技能相结合。 32名教师已经确定了正在进行的研究项目，将大大加强。 该项目通过提高从硅、陶瓷和金属制造2-D和3-D微/纳米尺度器件组件的能力，大大增强了制造传感2-D微器件和接口/封装技术的能力;因此可以制造完整的系统，包括与诸如泵，散热器，等，其能够在苛刻的工业或生物医学环境中操作。 优化有限的国家资源，设备制造设施将开放给所有国家的研究人员。 该基础设施促进了与在制造过程中需要强大微器件的区域行业的合作，为该州的经济发展和增长提供了基础。 这项工作还有助于提高大量学生的教育经验。