LCL: Analysis and Control of Microelectromechanical Systems (MEMS) in the Presence of Uncertainty

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Analysis and Control of MicroelectromechanicalSystems (MEMS) in the Presence of UncertaintyGeorge C. JohnsonAndrew PackardPanayiotis PapadopoulosDepartment of Mechanical EngineeringUniversity of CaliforniaBerkeley, CA 94720AbstractUncertainties in material properties and structural dimensions are unavoidable at any length scale, but they are particularly important as devices become smaller. This work seeks to identify and quantify the sources and effects of the inherent uncertainty in micro-electro-mechanical systems (MEMS). Methods for assessing the effects of this uncertainty on overall system response will be developed. Quantitative bounds on the effect of uncertainty for any given design will be accessible and, once this is achieved, design variables can be chosen that minimize the effects of the uncertainties. Software will be developed compatible with existing analysis packages, including finite elements, that will allow design optimization for MEMS in the presence of uncertainty.