Lubricants for Extreme Environments: An Atomistic Approach to Solving Friction and Stiction in MEMS

适用于极端环境的润滑剂：解决 MEMS 中摩擦和粘滞问题的原子方法

• 批准号: 0087866
• 负责人: Christine Grant
• 金额: $ 44.99万
• 依托单位: North Carolina State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-09-15 至 2004-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0087866&HistoricalAwards=false
• 关键词: Lubricants; Extreme; Environments; Atomistic; Approach

Christine S. Grant and Jacqueline KrimNorth Carolina State UniversityProposal 0087866Lubrication for Extreme Environments: An Atomistic Approach to SolvingFriction and Stiction in MEMSPROJECT ABSTRACT:Micro-Electro-Mechanical Systems (MEMS) are an emerging, cutting-edgetechnology which relies on the microfabrication of small scalemechanical components and the integration of those components with on-boardelectronic processing. Today's MEMS rely heavily on silicon-basedmaterials and/or fabrication processes which were originally developed for the microelectronics industry. While such processes and materials have yielded working devices, the materials choices are largely historical and may ultimately not result in optimal performance and mechanical reliability. With the current impetus towards mechanical system dimensions extending well into the nanometer regime, there is a growing need for concomitant studies of the mechanical, materials and tribological properties of sub-micron to molecular-scale systems. Since it is well-established that the macroscopic laws governing such properties are inapplicable at the molecular scale, the need to carry out new and fundamental research relevant to the development of optimal, or even operational submicron-scale mechanical systems, becomes increasingly pressing. The work funded here involves development of such lubricants for use in extreme MEMS operating environments.It is a direct, and integrated extension of the PI and co-PI's current research programs.The work to be performed will be comprehensive, involving the development of environmentally friendly stiction reducing chemical additives for the final rinse stages of MEMS devices, and theexamination of how such treatments affect the tribological properties of the deviceswhile in actual operation. Vapor phase lubricants will be screened by means of modern nanotribological techniques on materials of relevance to MEMS. The most promising candidates will then be directly tested onactual MEMS devices supplied by the PI and Co-PI's academic partner at NCSU, as well as on friction testing-MEMS devices produced at Sandia National Laboratories. The research will be meshed with the PI andCo-PI's ongoing educational and outreach efforts. These include outreach activities to underrepresented groups, undergraduate research participation in all aspects of the work to be performed, public lectures on the topic of nanotechnology and friction, and active involvement in undergraduate curriculum development on the topic of fundamentals of friction and lubrication.

项目摘要：微机电系统（MEMS）是一项新兴的尖端技术，它依赖于小型机械部件的微制造以及这些部件与板上电子加工的集成。今天的MEMS严重依赖于硅基材料和/或制造工艺，这些材料和/或制造工艺最初是为微电子工业开发的。虽然这样的工艺和材料已经产生了工作装置，但材料的选择在很大程度上是历史的，最终可能不会产生最佳的性能和机械可靠性。随着目前对机械系统尺寸的推动延伸到纳米范围，越来越需要对亚微米到分子尺度系统的机械、材料和摩擦学特性进行相应的研究。由于已经确定控制这些性质的宏观规律不适用于分子尺度，因此开展与开发最佳甚至可操作的亚微米尺度机械系统相关的新的基础研究的需求变得越来越迫切。这里资助的工作涉及在极端MEMS操作环境中使用这种润滑剂的开发。它是PI和co-PI当前研究项目的直接和综合扩展。这项工作将是全面的，包括为MEMS器件的最后冲洗阶段开发环保的减少粘结力的化学添加剂，以及在实际操作中检查这些处理如何影响器件的摩擦学性能。利用现代纳米摩擦学技术对与MEMS相关的材料进行气相润滑剂的筛选。最有希望的候选人将直接在由PI和Co-PI在NCSU的学术合作伙伴提供的实际MEMS器件上进行测试，以及在桑迪亚国家实验室生产的摩擦测试MEMS器件上进行测试。这项研究将与PI和co -PI正在进行的教育和推广工作相结合。这些活动包括向代表性不足的群体开展外展活动，本科生参与研究工作的各个方面，关于纳米技术和摩擦主题的公开讲座，以及积极参与关于摩擦和润滑基础主题的本科课程开发。