Fundamental and Technological Aspects of Finishing Balls of Advanced Ceramics, Glasses, and Silicon Using Magnetic Field Assisted Polishing

使用磁场辅助抛光精加工先进陶瓷、玻璃和硅球的基础和技术方面

• 批准号: 0100300
• 负责人: Ranga Komanduri
• 金额: $ 31万
• 依托单位: Oklahoma State University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2001
• 资助国家: 美国
• 起止时间: 2001-04-01 至 2005-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0100300&HistoricalAwards=false
• 关键词: Fundamental; Technological; Aspects; Finishing; Balls

This project is on the finishing of balls of advanced ceramics, glasses, and semiconductor material using the magnetic float polishing technology. Conventional finishing of advanced ceramics and glasses by grinding, polishing, lapping generally leads to several defects including large scratches, formation of pits due to the dislodgment of grains, viscous flow of the glassy phase in the case of glass, and surface and subsurface microcracks. These defects affect the properties and performance of these materials and are traditionally removed by subsequent diamond polishing. To address this difficult problem, a "gentle" finishing technology, called the magnetic float polishing was developed (in a recently completed investigation supported by NSF) without the need to use diamond abrasives. Surface finish on the order of 4 nm Ra and 40 nm Rmax with sphericity in the range of 0.25 micrometers were accomplished on Si3N4 balls with a total polishing time of ~ 20 hours. A better understanding of the mechanical and chemo-mechanical actions involved in the polishing of Si3N4 balls has resulted. In this project, the investigators intend to generalize this work to cover other advanced ceramics (balls of different size and number per batch), various glasses, and silicon. Advanced ceramics, such as Si3N4, SiC, Zr02, and Al2O3 are increasing being considered for structural applications of which Si3N4, in specific, is chosen for hybrid ball and roller bearing applications. Similarly, various types of glasses are used for optical applications, such as lenses and recently spherical silicon balls are being considered for micro-electronic applications (instead of silicon wafers). This research would be the first of its kind on the finishing of silicon balls (instead of wafers) by magnetic float polishing. Thus, the finishing technology proposed is expected to address structural, optical, and electronic applications that can have a significant impact on the manufacture of balls for various advanced technology applications.

本项目是利用磁浮子抛光技术对高级陶瓷、玻璃和半导体材料的球进行精加工。传统的通过研磨、抛光、研磨对高级陶瓷和玻璃进行精加工通常会导致一些缺陷，包括大的划痕、由于颗粒位移而形成的凹坑、玻璃玻璃相的粘性流动以及表面和表面下的微裂纹。这些缺陷影响这些材料的性质和性能，通常通过后续的金刚石抛光来去除。为了解决这个难题，一种“温和”的抛光技术被开发出来，称为磁浮抛光（在NSF最近完成的一项研究中），而不需要使用金刚石磨料。在Si3N4球上完成了4 nm Ra和40 nm Rmax的表面光洁度，球度在0.25微米范围内，总抛光时间约为20小时。结果更好地理解了氮化硅球抛光过程中的机械和化学-机械作用。在这个项目中，研究人员打算将这项工作推广到其他高级陶瓷（每批不同尺寸和数量的球），各种玻璃和硅。高级陶瓷，如Si3N4， SiC， Zr02和Al2O3越来越多地被考虑用于结构应用，特别是Si3N4被选择用于混合球和滚子轴承应用。同样，各种类型的玻璃用于光学应用，例如透镜和最近正在考虑用于微电子应用的球形硅球（而不是硅晶圆）。这项研究将是同类研究中第一个用磁浮子抛光硅球（而不是晶圆片）的研究。因此，提出的精加工技术有望解决结构，光学和电子应用，这些应用可能对各种先进技术应用的球的制造产生重大影响。