GOALI: Creation of Crystalline Surfaces for Short Wavelength Light Emitters

这个大学-工业合作研究项目旨在通过对ZnO衬底加工产生的缺陷的基本理解，以及随后的薄膜同质外延生长，来提高用于短波长光发射器（蓝光/紫外LED和激光器）的晶体表面的制造能力。 ZnO衬底将通过化学机械抛光和进一步的预生长处理技术制备，之后将在衬底上生长同质外延膜。 在表面处理的各个阶段产生的缺陷将与高能量背散射光谱，离子通道和扫描电性能显微镜检查。 这种理解将有助于确定的加工条件，显示出生产超高质量的ZnO外延膜的承诺。 这种理解的发展有可能有助于成功演示ZnO的同质外延生长。 这项工作将进一步有助于先进的表面表征工具，需要评估近表面的纳米尺度的损伤的发展。 俄克拉荷马州州立大学、皮切尔技术公司和洛斯阿拉莫斯国家实验室将进行广泛的合作。

This university-industry collaborative research project seeks to advance the capability for the manufacture of crystalline surfaces for use in short wavelength light emitters (blue/UV LEDs and lasers) by contributing to a basic understanding of the generation of defects resultant from the processing of ZnO substrates, and the subsequent homoepitaxial growth of films. ZnO substrates will be prepared by chemomechanical polishing and further pre-growth processing techniques, after which homoepitaxial films will be grown on the substrates. The defects generated at various stages of surface processing will be examined with high energy backscattering spectrometry, ion channeling and scanning electrical properties microscopy. This understanding will aid in identifying the processing conditions which show promise for producing ultra-high quality epitaxial films on ZnO. Development of this understanding has the potential to contributing to the successful demonstration of the homoepitaxial growth of ZnO. This work will further contribute to the development of advanced surface characterization tools which are needed for assessing near surface damage at the nanometer scale. An extensive collaborative effort involving Oklahoma State University, Eagle-Picher Technologies and Los Alamos National Laboratory will be undertaken.