Acquisition of an Electron Beam Lithography System for Nanoscience and Nanotechnology Research and Education

CTS-0116504 MRI：为纳米科学研究和教育采购电子束光刻系统德克萨斯大学奥斯汀分校784，000美元摘要德克萨斯大学奥斯汀分校（UT Austin）将购买电子束光刻（EBL）系统（JEOL JBX-5000 LS）用于纳米科学和纳米技术研究和教育。 EBL是在100 nm或更小尺寸的衬底上定义结构特征的标准方法。该EBL仪器将有助于正在进行的各种领域的研究，包括抗蚀剂材料开发，其中包括将EBL定义的结构应用于微机电系统的努力（MEMS-微流体和传感器），电可擦除和可编程只读存储器（EEPROM）的表征，以及纳米结构中介观物理学的基础研究，例如硅纳米线和碳纳米管。 UT Austin也是生物纳米电子学领域的领导者，开发了用于电子材料加工的新的进化工程肽，而EBL接口将有助于这些努力。 EBL仪器的收购将有助于促进具有不同背景的学生共同努力，为未来技术制造小型结构的环境。 UT奥斯汀，作为一个机构，已经认识到现场EBL的迫切需要。 德克萨斯州材料研究所（TMI），纳米和分子科学与技术中心（CNM），微电子研究中心（MRC），工程学院以及化学工程，化学和生物化学以及物理学系已承诺提供46.6万美元的配套资金用于仪器购买沿着支持全职技术人员，年薪7万美元。 该仪器将通过MRC管理，位于UT Austin Pickel Research Campus的洁净室（12，000平方英尺的100级和1000级空间），它将大大加强和补充现有的微加工和纳米加工设施。

CTS-0116504MRI: Acquisition of an Electron-Beam Lithography System for Nanoscience Research and EducationBrian A. KorgelUniversity of Texas Austin$784,000ABSTRACTAn electron beam lithography (EBL) system (JEOL JBX-5000LS) will be acquired for nanoscience and nanotechnology research and education at the University of Texas at Austin (UT Austin). EBL is the standard method for defining structural features on substrates with dimensions of 100 nm or less. This EBL instrument will aid ongoing research in a diverse range of fields including resist-material development, which includes efforts to use EBL-defined structures for applications in microelectromechanical systems (MEMS-both microfluidics and sensors), characterization of electrically erasable and programmable read-only memories (EEPROM), and fundamental studies of mesoscopic physics in nanostructures, such as silicon nanowires and carbon nanotubes. UT Austin is also a leader in the area of bionanoelectronics, with the development of new evolutionarily engineered peptides for electronic materials processing, and interfacing EBL will aid these efforts. The acquisition of the EBL instrument will help promote an environment where students with diverse backgrounds work together to make small structures for future technologies. UT Austin, as an institution, has recognized the critical need for on-site EBL. The Texas Materials Institute (TMI), the Center for Nano- and Molecular Science and Technology (CNM), the Microelectronics Research Center (MRC), the College of Engineering, and the Departments of Chemical Engineering, Chemistry and Biochemistry, and Physics have committed $466K in matching funds toward the instrument purchase along with support for a full-time technician at a salary of $70K per year. The instrument will be managed through the MRC and located in the cleanroom (12,000 square feet of class 100 and class 1000 space) at the Pickel Research Campus at UT Austin where it will greatly strengthen and complement the existing microfabrication and nanofabrication facilities.