Nanomachining by Combining Femtosecond Laser Radiation with Near-Field Scanning Optical Microscope: Fundamental Studies and Applications

飞秒激光辐射与近场扫描光学显微镜相结合的纳米加工：基础研究和应用

• 批准号: 0209817
• 负责人: Costas Grigoropoulos
• 金额: $ 18.86万
• 依托单位: University of California-Berkeley
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2002
• 资助国家: 美国
• 起止时间: 2002-08-15 至 2004-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0209817&HistoricalAwards=false
• 关键词: Nanomachining; Combining; Femtosecond; Laser; Radiation

The production of surface nanofeatures has many important applications in critical emerging technology fields, including the heterogeneous integration of nanoscale components and devices in microelectronics, information storage and optoelectronic systems. The ultra-fast temporal scale of femtosecond pulsed laser radiation will be combined with the high spatial resolution of near-field optical microscope for nanomachining. This hybrid single-step experimental methodology offers superior flexibility and control over the nanofabrication process. The project will encompass both basic investigation of the extremely rapid transport phenomena in nanometer length scales as well as the design and demonstration of novel practical processes for nanomachining and nanofabrication. The main objectives of the proposed research are given below:1) Development of experimental procedures for nanomachining by coupling femtosecond laser radiation with near-field optical microscopes.2) Detailed study of the fundamental mechanisms of the ultra-fast laser energy deposition and the ensuing nanoscale phase transformations by in-situ time-resolved optical spectroscopy.3) Investigation of the ultra-fast transport phenomena in the machining, cutting and joining of nanostructures.In addition to the impact of the work in many nanotechnology applications, fundamental insight will be gained into the complex thermophysical phenomena in ultra-fast laser-induced nanoscale surface modification processes. Funding is being provided by the Thermal Transport and Thermal Processing Program of the Chemical and Transport Systems Division and by the Nanomanufacturing Program of the Design, Manufacturing and Industrial Innovation Division.

表面纳米特征的生产在关键新兴技术领域具有许多重要应用，包括微电子、信息存储和光电子系统中纳米级组件和设备的异质集成。飞秒脉冲激光辐射的超快时间尺度将与近场光学显微镜的高空间分辨率相结合，用于纳米加工。这种混合单步实验方法提供了上级的灵活性和控制的纳米纤维工艺。该项目将包括在纳米长度尺度上的极快传输现象的基础研究，以及纳米加工和纳米纤维的新型实用工艺的设计和演示。拟议研究的主要目标如下：1）通过将飞秒激光辐射与近场光学显微镜耦合来开发纳米加工的实验程序。2）通过原位时间分辨光谱详细研究超快激光能量沉积的基本机制和随后的纳米级相变。3）研究纳米结构的加工，切割和连接中的超快传输现象。除了在许多纳米技术应用中的工作影响外，将获得对超快激光诱导纳米级表面改性过程中复杂热物理现象的基本见解。 资金由化学和运输系统司的热运输和热处理计划以及设计，制造和工业创新司的纳米制造计划提供。