Nanomachining by Combining Femtosecond Laser Radiation with Near-Field Scanning Optical Microscope: Fundamental Studies and Applications

表面纳米特征的制备在关键新兴技术领域有许多重要的应用，包括微电子、信息存储和光电子系统中纳米级元件和器件的异质集成。超快时间尺度的飞秒脉冲激光辐射将与近场光学显微镜的高空间分辨率相结合，用于纳米机械加工。这种混合的单步实验方法提供了卓越的灵活性和对纳米制造过程的控制。该项目将包括对纳米尺度上极快速传输现象的基本调查，以及纳米机械加工和纳米制造的新的实用工艺的设计和演示。这项研究的主要目标如下：1)发展飞秒激光与近场光学显微镜相结合的纳米机械加工的实验方法。2)利用原位时间分辨光学光谱仪详细研究超快激光能量沉积和随后的纳米尺度相变的基本机制。3)研究纳米结构加工、切割和连接过程中的超快传输现象。除了在许多纳米技术应用中的影响外，还将从根本上洞察超快激光诱导纳米尺度表面修饰过程中的复杂热物理现象。资金由化学和运输系统部门的热运输和热加工计划以及设计、制造和工业创新部门的纳米制造计划提供。

The production of surface nanofeatures has many important applications in critical emerging technology fields, including the heterogeneous integration of nanoscale components and devices in microelectronics, information storage and optoelectronic systems. The ultra-fast temporal scale of femtosecond pulsed laser radiation will be combined with the high spatial resolution of near-field optical microscope for nanomachining. This hybrid single-step experimental methodology offers superior flexibility and control over the nanofabrication process. The project will encompass both basic investigation of the extremely rapid transport phenomena in nanometer length scales as well as the design and demonstration of novel practical processes for nanomachining and nanofabrication. The main objectives of the proposed research are given below:1) Development of experimental procedures for nanomachining by coupling femtosecond laser radiation with near-field optical microscopes.2) Detailed study of the fundamental mechanisms of the ultra-fast laser energy deposition and the ensuing nanoscale phase transformations by in-situ time-resolved optical spectroscopy.3) Investigation of the ultra-fast transport phenomena in the machining, cutting and joining of nanostructures.In addition to the impact of the work in many nanotechnology applications, fundamental insight will be gained into the complex thermophysical phenomena in ultra-fast laser-induced nanoscale surface modification processes. Funding is being provided by the Thermal Transport and Thermal Processing Program of the Chemical and Transport Systems Division and by the Nanomanufacturing Program of the Design, Manufacturing and Industrial Innovation Division.