NIRT: Staggered Probes for Integrating Nano Machining and Metrology

NIRT：用于集成纳米加工和计量的交错探针

• 批准号: 0210559
• 负责人: M. Pinar Menguc
• 金额: --
• 依托单位: University of Kentucky Research Foundation
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2002
• 资助国家: 美国
• 起止时间: 2002-08-01 至 2008-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0210559&HistoricalAwards=false
• 关键词: NIRT; Staggered; Probes; Integrating; Nano

This proposal was received in response to Nanoscale Science and Engineering Initiative, NSF 01-157, category NIRT. Our interdisciplinary team is investigating a new process for nanoscale machining employing field emission of electrons from carbon nanotubes. High-precision nanomachining will be obtained by the concentrated thermal power transmitted by electron beams to a thin-film workpiece. In order to investigate the nanomachining process, we will develop a staggered probe that integrates multiple carbon nanotubes on a single probe for integrated nanometrology by scanning probe microscopy and nanomachining by field emission. Such probes will enable the experimental demonstration and investigation of nanomachining with field emission from nanotubes.This research will demonstrate a new high-precision manufacturing process for producing nano-scale patterns that will impact many disciplines such as nanoelectronics, nanoscience, biology, and energy. The research will foster a multi-university, interdisciplinary partnership in the areas of precision manufacturing, nanoscale thermal sciences, solid-state physics, and material science. A broad set of educational and outreach activities will include nanotechnologyworkshops chemistry and pre-engineering students at Kentucky State University (KSU) and a summer microscopy fellowship for KSU minority students at the University of Kentucky's microscopy facility.

该提案是为了响应纳米科学与工程倡议、NSF 01-157、NIRT 类别而收到的。 我们的跨学科团队正在研究一种利用碳纳米管电子场发射进行纳米级加工的新工艺。 通过电子束将集中热功率传输到薄膜工件上，可以获得高精度纳米加工。 为了研究纳米加工过程，我们将开发一种交错探针，将多个碳纳米管集成在单个探针上，通过扫描探针显微镜和场发射纳米加工进行集成纳米计量学。 此类探针将使纳米管场发射纳米加工的实验演示和研究成为可能。这项研究将展示一种用于生产纳米级图案的新型高精度制造工艺，该工艺将影响纳米电子学、纳米科学、生物学和能源等许多学科。 该研究将促进精密制造、纳米热科学、固态物理学和材料科学领域的多大学、跨学科合作伙伴关系。一系列广泛的教育和外展活动将包括为肯塔基州立大学 (KSU) 化学和工程预科学生举办的纳米技术研讨会，以及为肯塔基州立大学显微镜设施中的 KSU 少数族裔学生提供的夏季显微镜奖学金。