NIRT: Staggered Probes for Integrating Nano Machining and Metrology

该提案是响应纳米科学与工程倡议，NSF 01-157，类别NIRT。 我们的跨学科团队正在研究一种利用碳纳米管场发射电子的纳米级加工新工艺。 高精度的纳米加工将通过电子束传输到薄膜工件的集中热功率来获得。 为了研究纳米加工过程，我们将开发一种交错探针，它将多个碳纳米管集成在单个探针上，用于通过扫描探针显微镜进行集成纳米测量和通过场发射进行纳米加工。 这种探针将使纳米管场发射纳米加工的实验演示和研究成为可能。这项研究将展示一种新的高精度制造工艺，用于生产纳米尺度的图案，这将影响纳米电子学、纳米科学、生物学和能源等许多学科。 该研究将促进精密制造，纳米热科学，固态物理和材料科学领域的多大学，跨学科合作伙伴关系。一系列广泛的教育和推广活动将包括在肯塔基州州立大学（KSU）为化学和工程预科学生举办的纳米技术讲习班，以及在肯塔基州大学显微镜设施为KSU少数民族学生举办的夏季显微镜研究金。

This proposal was received in response to Nanoscale Science and Engineering Initiative, NSF 01-157, category NIRT. Our interdisciplinary team is investigating a new process for nanoscale machining employing field emission of electrons from carbon nanotubes. High-precision nanomachining will be obtained by the concentrated thermal power transmitted by electron beams to a thin-film workpiece. In order to investigate the nanomachining process, we will develop a staggered probe that integrates multiple carbon nanotubes on a single probe for integrated nanometrology by scanning probe microscopy and nanomachining by field emission. Such probes will enable the experimental demonstration and investigation of nanomachining with field emission from nanotubes.This research will demonstrate a new high-precision manufacturing process for producing nano-scale patterns that will impact many disciplines such as nanoelectronics, nanoscience, biology, and energy. The research will foster a multi-university, interdisciplinary partnership in the areas of precision manufacturing, nanoscale thermal sciences, solid-state physics, and material science. A broad set of educational and outreach activities will include nanotechnologyworkshops chemistry and pre-engineering students at Kentucky State University (KSU) and a summer microscopy fellowship for KSU minority students at the University of Kentucky's microscopy facility.