Acquisition of an Electron Beam Lithography System for a Nanotechnology Research and Education Facility at UC Irvine

为加州大学欧文分校的纳米技术研究和教育设施采购电子束光刻系统

• 批准号: 0216635
• 负责人: Peter Burke
• 金额: $ 35.78万
• 依托单位: University of California-Irvine
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2002
• 资助国家: 美国
• 起止时间: 2002-08-01 至 2006-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0216635&HistoricalAwards=false
• 关键词: Acquisition; Electron; Beam; Lithography; System

This award from the Major Research Instrumentation Program supports the acquisition an ultra-high resolution electron beam nanolithography system for research and education programs led by a multi-disciplinary team of investigators from physics, chemistry, electrical engineering, materials science, and biomedical engineering at the University of California, Irvine (UCI). The instrumentation will further enhance current research activities at UCI's Integrated Nanosystems Research Facility (INRF), currently serving over 100 academic users in collaboration with over 50 companies (25 of whom are users) in order to support research in the nascent fields of nano-electronics, nano-fluidics, molecular electronics, nano-mechanics, and nano-biotechnology. The system will offer a unique capability to university, industry, and community researchers to (among other things) design and process novel materials and devices at the nanoscale such as molecular wires and devices, carbon nanotubes, and single-electron transistors, to investigate single-molecule chemistry, to investigate the use of nano-electronic devices with the preparation of nano-biological polymer materials, and to accomplish nano-bio tasks such as cell membrane signal transduction characterization and protein and DNA analysis and sequencing.This MRI grant will support the acquisition an ultra-high resolution electron beam nanolithography system for research and education programs led by a multi-disciplinary team of investigators from physics, chemistry, electrical engineering, materials science, and biomedical engineering at the University of California, Irvine (UCI). The instrumentation will further enhance current research activities at UCI's Integrated Nanosystems Research Facility (INRF), currently serving over 100 academic users in collaboration with over 50 companies (25 of whom are users) in order to support research in the nascent fields of nano-electronics, nano-fluidics, molecular electronics, nano-mechanics, and nano-biotechnology. The system will offer a unique capability to the university, industry, and community researchers to (among other things) design and process novel materials and devices at the nanoscale such as molecular wires and devices, carbon nanotubes, and single-electron transistors, to investigate single-molecule chemistry, to investigate the use of nano-electronic devices with the preparation of nano-biological polymer materials, and to accomplish nano-bio tasks such as cell membrane signal transduction characterization and protein and DNA analysis and sequencing.

来自主要研究仪器计划的这一奖项支持在加州大学欧文分校（UCI）由物理、化学、电气工程、材料科学和生物医学工程的多学科研究人员团队领导的研究和教育计划中获得超高分辨率电子束纳米光刻系统。该仪器将进一步加强UCI的综合纳米系统研究设施（INRF）目前的研究活动，目前与50多家公司（其中25家是用户）合作，为100多名学术用户提供服务，以支持纳米电子学，纳米流体学，分子电子学，纳米力学和纳米生物技术等新兴领域的研究。该系统将为大学、工业和社区研究人员提供独特的能力，（除其他事项外）设计和处理纳米级的新材料和器件，如分子线和器件，碳纳米管和单电子晶体管，研究单分子化学，研究纳米电子器件的使用与纳米生物聚合物材料的制备，并完成纳米生物任务，如细胞膜信号转导表征和蛋白质和DNA分析和测序。这项MRI赠款将支持收购超高分辨率电子束纳米光刻系统的研究和教育计划，由来自物理，化学，电气工程，材料科学，和生物医学工程在加州大学欧文分校（UCI）。该仪器将进一步加强UCI的综合纳米系统研究设施（INRF）目前的研究活动，目前与50多家公司（其中25家是用户）合作，为100多名学术用户提供服务，以支持纳米电子学，纳米流体学，分子电子学，纳米力学和纳米生物技术等新兴领域的研究。该系统将为大学、工业和社区研究人员提供独特的能力，（除其他事项外）设计和处理纳米级的新材料和器件，如分子线和器件，碳纳米管和单电子晶体管，研究单分子化学，研究纳米电子器件的使用与纳米生物聚合物材料的制备，并完成纳米生物任务，如细胞膜信号转导表征以及蛋白质和DNA分析和测序。