Built-in Reliability through Environmental Stress Screening: Model Validation for Nano Products

良率和可靠性是决定微电子和纳米制造行业成功与否的关键因素。这项建议解决了一种内置的可靠性方法，可以控制和预测复杂纳米产品的可靠性和成品率。这项工作的目的是找到有效的方法来筛选早期故障，这些故障数量如此之多，成本如此之高，以至于纳米产品行业将成品率视为特权信息。所提出的建模技术将通过分析新制造的用于可靠性测试的亚5 nm高k介质器件的物理和电学特性来验证。该项目的目标是通过利用尚未开发的高可靠性和负担得起的成本的潜力，使更充分地利用纳米系统成为可能。这项工作的最终结果将为提高纳米产品的可靠性铺平道路，并将确定控制产量和可靠性的范例。这个为期3年的多学科项目由来自不同学科的一名微电子可靠性专家和一名纳米设备工程师领导。该项目将为在不兼容性主导系统性能的情况下对纳米可靠性进行建模奠定理论基础。该项目产生的出版物和智力发明预计将影响纳米产业，并影响高等教育机构正在教授的材料。

Yield and reliability are key factors in determining success in the microelectronics and nano production industry. This proposal addresses a built-in-reliability approach that controls and predicts both reliability and yield in complex nano products. The purpose of this work is to find effective ways to screen the early failures that are so numerous and costly that the nano products industry has treated yield as privileged information. The proposed modeling techniques will be validated by analyzing the physical and electrical properties of the newly fabricated sub 5 nm high k dielectric devices for reliability testing. The objective of this project is to make it possible to more fully utilize nano systems by capitalizing on as yet underdeveloped potential for high reliability and affordable cost. The end results of the work will pave the way for reliability enhancement in nano products, and will define a paradigm for controlling yield and reliability as well. At the end, a new protocol for testing and testing standards will be devised.The 3-year multidisciplinary project is led by a microelectronics reliability specialist and a nano device engineer from different academic disciplines. The project will build a theoretical foundation for modeling nano reliability in cases where incompatibility dominates system performance. The publications and intellectual inventions that emerge from this project are expected to impact the nano industry as well as influence the material that is being taught in institutions of higher learning.