Built-in Reliability through Environmental Stress Screening: Model Validation for Nano Products

通过环境应力筛选实现内置可靠性：纳米产品的模型验证

• 批准号: 0300032
• 负责人: Way Kuo
• 金额: $ 40万
• 依托单位: Texas A&M Engineering Experiment Station
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-06-01 至 2004-10-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0300032&HistoricalAwards=false
• 关键词: Built; Reliability; through; Environmental; Stress

Yield and reliability are key factors in determining success in the microelectronics and nano production industry. This proposal addresses a built-in-reliability approach that controls and predicts both reliability and yield in complex nano products. The purpose of this work is to find effective ways to screen the early failures that are so numerous and costly that the nano products industry has treated yield as privileged information. The proposed modeling techniques will be validated by analyzing the physical and electrical properties of the newly fabricated sub 5 nm high k dielectric devices for reliability testing. The objective of this project is to make it possible to more fully utilize nano systems by capitalizing on as yet underdeveloped potential for high reliability and affordable cost. The end results of the work will pave the way for reliability enhancement in nano products, and will define a paradigm for controlling yield and reliability as well. At the end, a new protocol for testing and testing standards will be devised.The 3-year multidisciplinary project is led by a microelectronics reliability specialist and a nano device engineer from different academic disciplines. The project will build a theoretical foundation for modeling nano reliability in cases where incompatibility dominates system performance. The publications and intellectual inventions that emerge from this project are expected to impact the nano industry as well as influence the material that is being taught in institutions of higher learning.

良率和可靠性是决定微电子和纳米生产行业成功的关键因素。该提案提出了一种内置可靠性方法，可以控制和预测复杂纳米产品的可靠性和良率。这项工作的目的是找到有效的方法来筛选早期故障，这些故障数量众多，成本高昂，以至于纳米产品行业将产量视为特权信息。提出的建模技术将通过分析新制造的亚5nm高k介电器件的物理和电学特性进行可靠性测试。该项目的目标是通过利用尚未开发的高可靠性和可承受的成本潜力，使纳米系统更充分地利用成为可能。这项工作的最终结果将为提高纳米产品的可靠性铺平道路，并将为控制产量和可靠性定义一个范例。最后，将制定新的测试协议和测试标准。这个为期三年的多学科项目由来自不同学科的微电子可靠性专家和纳米器件工程师领导。该项目将为在不兼容主导系统性能的情况下建模纳米可靠性奠定理论基础。从这个项目中产生的出版物和智力发明预计将影响纳米工业，并影响高等院校正在教授的材料。