NIRT: Three-Dimensional Nanomanufacturing Processes for Nanophotonic Devices and Systems

NIRT：纳米光子器件和系统的三维纳米制造工艺

• 批准号: 0304650
• 负责人: Rafael Piestun
• 金额: $ 100万
• 依托单位: University of Colorado at Boulder
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-08-15 至 2008-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0304650&HistoricalAwards=false
• 关键词: NIRT; Three; Dimensional; Nanomanufacturing; Processes

The primary objective of this Nanoscale Interdisciplinary Research Teams (NIRT) project is to establish an interdisciplinary research and education program in a new area of nanomanufacturing involving scalable processes for the fabrication of wide-band gap three-dimensional (3D) photonic crystals (PC) possessing engineered defects and their integration into photonic devices and systems. New approaches are needed for the miniaturization and integration of optical components into compact functional systems capable of generating, processing, and detecting light signals. PCs have been recognized as one of the most promising technologies for this goal. However, the fabrication of 3D photonic ban gap (PBG) structures for the visible and IR spectrum remains a considerable challenge. This proposal presents techniques to fully realize the potential of the PC paradigm for industrial application and commercialization. The building blocks will be coated nanospheres. Periodic arrays of such metal-dielectric nanospheres present a wide, robust, and complete PBG. Traditionally unrelated techniques will be used to fabricate and integrate the PCs: atomic layer deposition (ALD), self-assembly of colloidal nanospheres, 3D femtosecond nanomachining, and lithographic processing. Self-assembly will be combined with anisotropic etching to pattern the PC on silicon wafers with controlled shape, thickness, orientation and location relative to other opt electronic components. Ultra short laser pulse nanomachining will be used to create well-defined defects. Several characterization techniques will be implemented to analyze the composition, structure, and optical properties of the PC, and devices.This research will provide a fundamental understanding of basic manufacturing processes and, if successful, will establish an unprecedented large-scale integrated-nanophotonics fabrication technology. Partnerships have been established with the National Institute of Standards and Technologies and with Agilent technologies laboratories. Another objective of this project is to educate graduate and undergraduate students as well as the general public in the area of nanomanufacturing of photonic systems and its implications for society. The project will integrate education and outreach with research in nanomanufacturing processes to create the human infrastructure required for the development of nanophotonics technologies in the years to come. The program proposes the following specific activities: (1) to incorporate the outcome of research into graduate and undergraduate courses; (2) to coordinate a new interdisciplinary nanomanufacturing seminar series; (3) to organize outreach activities with graduate student participation, (d) to generate and maintain a dedicated website for the general public; (4) to interact with industry and national labs; and (5) to make available the developed infrastructure to other researchers.

该纳米级跨学科研究团队 (NIRT) 项目的主要目标是在纳米制造新领域建立跨学科研究和教育计划，涉及可扩展的工艺，用于制造具有工程缺陷的宽带隙三维 (3D) 光子晶体 (PC) 并将其集成到光子器件和系统中。需要新的方法来将光学元件小型化并集成到能够生成、处理和检测光信号的紧凑功能系统中。个人电脑被认为是实现这一目标最有前途的技术之一。然而，制造可见光和红外光谱的 3D 光子带隙 (PBG) 结构仍然是一个相当大的挑战。该提案提出了充分发挥 PC 范例在工业应用和商业化方面的潜力的技术。构建块将被涂覆纳米球。这种金属介电纳米球的周期性阵列呈现出广泛、稳健且完整的PBG。传统上不相关的技术将用于制造和集成 PC：原子层沉积 (ALD)、胶体纳米球自组装、3D 飞秒纳米加工和光刻处理。自组装将与各向异性蚀刻相结合，在硅晶圆上对 PC 进行图案化，并相对于其他光学电子元件控制形状、厚度、方向和位置。超短激光脉冲纳米加工将用于创建清晰的缺陷。 将采用多种表征技术来分析 PC 和器件的组成、结构和光学特性。这项研究将为基本制造工艺提供基本的了解，如果成功，将建立前所未有的大规模集成纳米光子制造技术。与美国国家标准与技术研究所以及安捷伦技术实验室建立了合作伙伴关系。 该项目的另一个目标是对研究生和本科生以及公众进行光子系统纳米制造领域及其对社会影响的教育。该项目将把教育和推广与纳米制造工艺的研究结合起来，以创建未来几年纳米光子技术发展所需的人力基础设施。该计划提出以下具体活动：（1）将研究成果纳入研究生和本科生课程； (2) 协调新的跨学科纳米制造研讨会系列； (3) 组织研究生参与的外展活动， (d) 为公众创建和维护专门的网站； (4) 与行业和国家实验室互动； (5) 向其他研究人员提供已开发的基础设施。