Multi-Scale, Multi-Physics Modeling and Characterization of Electrothermal Transport in RF MEMS Microcontacts
Multi-Scale, Multi-Physics Modeling and Characterization of Electrothermal Transport in RF MEMS Microcontacts
批准号:
0330963
负责人:
Katsuo Kurabayashi
金额:
$23.96万
依托单位国家:
美国
项目类别:
Continuing Grant
财政年份:
2003
资助国家:
美国
项目状态:
已结题
起止时间:
2003-09-01 至 2006-08-31
中文摘要
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英文摘要
0330963KurabayashiThis research program investigates the multi-physics phenomena at MEMS-scale contacts to permit reliable design of RF MEMS switches for a wide variety of applications taking advantage of RF MEMS technology. This project aims to develop models for the MEMS-scale contact asperity heating at varying contact force, contact area geometry, surface conditions, and asperity mechanics. Such models will allow the development of design rules and new RF MEMS geometries which extend their lifecycle and power-handling capability.
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