Multi-Scale, Multi-Physics Modeling and Characterization of Electrothermal Transport in RF MEMS Microcontacts

RF MEMS 微接触中电热传输的多尺度、多物理场建模和表征

• 批准号: 0330963
• 负责人: Katsuo Kurabayashi
• 金额: $ 23.96万
• 依托单位: Regents of the University of Michigan - Ann Arbor
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-09-01 至 2006-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0330963&HistoricalAwards=false
• 关键词: Multi; Scale; Physics; Modeling; Characterization

0330963KurabayashiThis research program investigates the multi-physics phenomena at MEMS-scale contacts to permit reliable design of RF MEMS switches for a wide variety of applications taking advantage of RF MEMS technology. This project aims to develop models for the MEMS-scale contact asperity heating at varying contact force, contact area geometry, surface conditions, and asperity mechanics. Such models will allow the development of design rules and new RF MEMS geometries which extend their lifecycle and power-handling capability.

0330963Kurabayashi这项研究计划研究MEMS级触点的多物理现象，以便利用RFMEMS技术为各种应用程序可靠地设计RFMEMS开关。本项目旨在开发不同接触力、接触区几何形状、表面条件和粗糙度力学条件下的MEMS尺度接触粗糙度加热模型。这样的模型将允许开发设计规则和新的RFMEMS几何结构，以延长其生命周期和功率处理能力。