Acquisition of a Dual Beam FIB/SEM Instrument

在化学研究仪器和设施(CRIF)计划的支持下，佐治亚理工学院化学系将获得一台双光束聚焦离子束/扫描电子显微镜(FIB/SEM)。该设备将加强一些领域的研究，包括a)多功能扫描纳米探测器和基于量子级联激光的传感系统；b)使用包含纳米级场发射阵列的金属-绝缘体-金属(MIM)器件模拟表面化学；c)光学门控单分子晶体管；d)三维生物碎屑结构的保形化学转换；e)作为纳米生物传感器和纳米悬臂的纳米带；以及f)阻抗映射原子力显微镜(AFM)悬臂阵列。聚焦离子束(FIB)系统的基本工作原理类似于扫描电子显微镜(SEM)。然而，不是电子束(电子束)，而是直径小至5 nm的精细聚焦离子束聚焦在样品表面。在低束流下操作一次离子束可以使样品成像；在高束流下，会发生溅射或研磨。电子束光刻允许以更高的横向分辨率进行纳米制造，而离子束可以实现更短的处理时间、更高的产量和更宽的范围(微米到纳米)。这种双束仪器允许电子束和离子束能力。该仪器将是佐治亚州唯一可用的双光束FIB/SEM系统。

With support from the Chemistry Research Instrumentation and Facilities (CRIF) Program, the Department of Chemistry at Georgia Institute of Technology will acquire a dual beam focused ion beam/scanning electron microscope (FIB/SEM). This equipment will enhance research in a number of areas including a) multifunctional scanning nanoprobes and quantum cascade laser based sensing systems; b) stimulated surface chemistry using metal-insulator-metal (MIM) devices containing nano-scale field emission arrays; c) optically gated single molecule transistors; d) shape-preserving chemical conversion of 3-D bioclastic structures; e) nanobelts as nanobiosensors and nanocantilevers; and f) impedance mapping atomic force microscopy (AFM) cantilever arrays. The fundamental operating principle of the focused ion beam (FIB) systems is comparable to scanning electron microscopes (SEM). However, instead of an electron beam (e-beam), a finely focused beam of ions with a diameter as small as 5 nm is focused on the sample surface. Operating the primary ion beam at low beam currents allows imaging of the sample; at high beam currents, sputtering or milling occurs. E-beam lithography allows nanofabrication with higher lateral resolution, whereas ion beam enables short processing time, high throughput, and a broader range (micrometer to nanometer). This dual beam instrument allows for both e-beam and ion beam capabilities. This instrument will be the only dual beam FIB/SEM system available in the state of Georgia.