Acquisition of a Dual Beam FIB/SEM Instrument

购置双光束 FIB/SEM 仪器

• 批准号: 0343028
• 负责人: Thomas Orlando
• 金额: $ 48.4万
• 依托单位: Georgia Tech Research Corporation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-02-01 至 2007-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0343028&HistoricalAwards=false
• 关键词: Acquisition; Dual; Beam; FIB; SEM

With support from the Chemistry Research Instrumentation and Facilities (CRIF) Program, the Department of Chemistry at Georgia Institute of Technology will acquire a dual beam focused ion beam/scanning electron microscope (FIB/SEM). This equipment will enhance research in a number of areas including a) multifunctional scanning nanoprobes and quantum cascade laser based sensing systems; b) stimulated surface chemistry using metal-insulator-metal (MIM) devices containing nano-scale field emission arrays; c) optically gated single molecule transistors; d) shape-preserving chemical conversion of 3-D bioclastic structures; e) nanobelts as nanobiosensors and nanocantilevers; and f) impedance mapping atomic force microscopy (AFM) cantilever arrays. The fundamental operating principle of the focused ion beam (FIB) systems is comparable to scanning electron microscopes (SEM). However, instead of an electron beam (e-beam), a finely focused beam of ions with a diameter as small as 5 nm is focused on the sample surface. Operating the primary ion beam at low beam currents allows imaging of the sample; at high beam currents, sputtering or milling occurs. E-beam lithography allows nanofabrication with higher lateral resolution, whereas ion beam enables short processing time, high throughput, and a broader range (micrometer to nanometer). This dual beam instrument allows for both e-beam and ion beam capabilities. This instrument will be the only dual beam FIB/SEM system available in the state of Georgia.

在化学研究仪器和设施（CRIF）计划的支持下，格鲁吉亚理工学院化学系将获得双束聚焦离子束/扫描电子显微镜（FIB/SEM）。该设备将加强若干领域的研究，包括：a）多功能扫描纳米探针和基于量子级联激光的传感系统; B）使用含有纳米级场发射阵列的金属-绝缘体-金属（MIM）装置的受激表面化学; c）光选通单分子晶体管; d）三维生物钟结构的形状保持化学转化; e）作为纳米生物传感器和纳米antilevers的纳米带;和f）阻抗映射原子力显微镜（AFM）悬臂阵列。聚焦离子束（FIB）系统的基本工作原理与扫描电子显微镜（SEM）相当。 然而，代替电子束（e-beam），具有小至5 nm的直径的精细聚焦的离子束聚焦在样品表面上。 在低束流下操作初级离子束允许样品成像;在高束流下，发生溅射或铣削。 电子束光刻允许具有更高横向分辨率的纳米加工，而离子束能够实现短加工时间、高产量和更宽的范围（微米至纳米）。 这种双束仪器具有电子束和离子束功能。 该仪器将是格鲁吉亚州唯一可用的双光束FIB/SEM系统。