MRI: Acquisition of a Dual Beam Electron Beam/Focused Ion Beam System for Research and Education

MRI：获取用于研究和教育的双束电子束/聚焦离子束系统

• 批准号: 0922992
• 负责人: Gottfried Strasser
• 金额: $ 109.64万
• 依托单位: SUNY at Buffalo
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-09-01 至 2010-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0922992&HistoricalAwards=false
• 关键词: MRI; Acquisition; Dual; Beam; Electron

0922992StrasserThis proposal describes a request for NSF Major Research Instrumentation (MRI) support for acquisition of a dual beam SEM/FIB (Scanning Electron Microscope / Focused Ion Beam) system at the University at Buffalo (UB), State University of New York (SUNY). The instrument would be incorporated into and managed by UB's INS (Integrated Nanostructured Systems) Instrumentation Facility. The acquisition is driven by an interdisciplinary group of UB faculty from four different departments (Electrical Engineering, Chemical & Biological Engineering, Physics, and Chemistry). The envisioned instrument will allow UB researchers to expand their research activities into a broad range of new applications. The proposed instrument will be capable of fully automated preparation of samples for transmission electron microscopy (TEM), structuring and modifying surfaces, deep etching of materials, defining devices and depositing both metals and insulators with nanoscale resolution.

0922992斯特拉瑟本建议书描述了一项申请，要求NSF主要研究仪器（MRI）支持布法罗大学（UB）和纽约州立大学（SUNY）采购双束SEM/FIB（扫描电子显微镜/聚焦离子束）系统。该仪器将被纳入UB的INS（集成纳米结构系统）仪器设施并由其管理。此次收购是由来自四个不同部门（电气工程，化学生物工程，物理和化学）的UB教师的跨学科小组推动的。设想的仪器将允许UB研究人员将他们的研究活动扩展到广泛的新应用。拟议的仪器将能够全自动制备透射电子显微镜（TEM）样品，结构化和修改表面，材料的深蚀刻，定义设备和沉积金属和绝缘体纳米级分辨率。