CAREER: Advanced Temperature Compensation Techniques for Integrated Bulk-Mode Micro and Nano Mechanical Resonators

职业：集成体模式微纳米机械谐振器的先进温度补偿技术

• 批准号: 0348286
• 负责人: Farrokh Ayazi
• 金额: $ 40万
• 依托单位: Georgia Tech Research Corporation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-02-01 至 2010-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0348286&HistoricalAwards=false
• 关键词: CAREER; Advanced; Temperature; Compensation; Techniques

This CAREER proposal is aimed at the investigation and implementation of novel integrated temperature compensation techniques for high frequency (1-50GHz) and high quality factor (Q) bulk-mode micro and nano mechanical resonators with integrated nanoscale transducers. The intellectual merits of the proposed activity are:1. To develop integrated self-compensation techniques (oven-less) for temperature sensitivity of high-Q micro and nano mechanical resonators, without deteriorating the Q of the resonator.2. To implement high-Q bulk-mode nano-electromechanical resonators with integrated nanoscale transducers, and resonant frequencies deep into the Gigahertz range (1-50GHz);The broader impacts of the proposed activity are:- For the first time, it will result in the realization of temperature-compensated integrated micro/nanomechanical resonators with near zero temperature coefficient of frequency (zero-TCF), making it possible to replace the quartz crystals in numerous clocking, time keeping and frequency referencing applications with on-chip silicon electromechanical resonators. - The development of high performance GHz-frequency integrated resonators will make the integration of temperature-stable high frequency filters with RF circuits possible. Such filters currently present a bottleneck to the integration of high performance RF systems on a chip.- Bulk-mode nanomechanical resonators will have high Q (in the 1000's) in air and in liquid, while having high frequencies and very small mass. This will lead to the realization of precision resonant biochemical and biological sensor arrays at the nanoscale.The activities of this proposal will not only bring about significant scientific discoveries in the area of nano-electromechanical devices and systems, but will also enable realization of new low-cost, single-chip, precision RF-sensory micro-nodes by developing integrated solutions for nanoscale electromechanical building blocks of such systems.

本CAREER提案旨在研究和实现具有集成纳米级换能器的高频（1-50GHz）和高质量因子(Q)体模微纳机械谐振器的新型集成温度补偿技术。所提议的活动的智力价值是：1。在不降低高Q值微纳机械谐振器Q值的前提下，开发高Q值微纳机械谐振器温度灵敏度的集成自补偿技术（无烘箱）。采用集成纳米级换能器实现高q块模纳米机电谐振器，谐振频率深入千兆赫范围（1-50GHz）；所提出的活动的更广泛的影响是：-它将首次实现温度补偿集成微/纳米机械谐振器，其温度系数接近于零频率（zero- tcf），从而有可能用片上硅机电谐振器取代许多时钟，计时和频率参考应用中的石英晶体。-高性能ghz频率集成谐振器的开发将使温度稳定的高频滤波器与射频电路的集成成为可能。这种滤波器目前是芯片上高性能射频系统集成的瓶颈。-体模纳米机械谐振器在空气和液体中具有高Q值（在1000左右），同时具有高频率和非常小的质量。这将导致在纳米尺度上实现精密共振生化和生物传感器阵列。本提案的活动不仅将带来纳米机电设备和系统领域的重大科学发现，而且还将通过开发纳米级机电系统构建块的集成解决方案，实现新的低成本，单芯片，精确的rf传感微节点。