CAREER: Process Engineering of Chemical Bath Deposition: A Soft Solution Route to Flexible Electronics

这项职业补助金结合了微电子加工领域的研究和教育活动。研究方向：主要研究在柔性聚合物基板上采用低温加工技术制备复合半导体器件。大多数化合物半导体具有比非晶硅和有机半导体更高的固有载流子迁移率的优点。化学浴沉积（CBD）是一种基于水溶液的薄膜沉积技术，能够在低温下沉积外延化合物半导体层。对CBD进程的基本理解是有限的。本项目涉及到粒子成核、生长、沉积和分子水平非均质薄膜生长机制的基础研究实验技术的发展，以及用于定制薄膜微纳米结构的撞击流CBD反应器的开发。冲击流反应器利用微反应技术来控制纳米颗粒在冲击流中的大小和分布。该项目的成功实施不仅将促进对柔性半导体器件制造的CBD工艺的基本理解，还将为许多基于溶液的工艺的颗粒形成和沉积特性的基础研究建立新的研究工具。此外，撞击流CBD反应器可为纳米制造提供一种新的薄膜沉积技术。广泛影响：补充研究计划的是PI基于研究文献的综合和他自己的研究活动开发实验室模块的计划。他计划以现代技术应用为例，学习基础知识——为此，他计划开发一个基于CBD和微接触印刷的低成本晶体管实验室；开发基于微反应技术的化工教学模块；并继续开发和推广微电子处理单元操作模块。

This CAREER grant combines research and educational initiatives in the area of microelectronics processing.Research:The research program focuses on fabrication of compound semiconductor devices on flexible polymeric substrates by low temperature processing technology. Most compound semiconductors have the advantage of higher intrinsic carrier mobility over amorphous silicon and organic semiconductors. Chemical bath deposition (CBD) is an aqueous solution-based film deposition technique with the capability to deposit epitaxial compound semiconductor layers at low temperatures. Fundamental understanding of the CBD process is limited. This project involves the development of experimental techniques for fundamental investigation of particle nucleation, growth, deposition and molecular level heterogeneous thin film growth mechanisms, and development of a n impinging flow CBD reactor to tailor thin film micro- and nanostructures. The impinging flow reactor takes advantage of the microreation technology to control nanoparticle size and distribution in the impinging fluxes. Successful implementation of this project will not only advance basic understanding of the CBD process for the fabrication of flexible semiconductor devices, it will also establish a new research tool for the fundamental investigation of particle formation and deposition characteristics of many solution-based processes. In addition, the impinging flow CBD reactor could lead to a new thin film deposition technique for nanofabrication.Broad Impact:Complementing the research plan is the PI's plan to develop laboratory modules based on the synthesis of the research literature and the his own research activities. He plans to use modern technical applications as example in learning the fundamentals - to this end he plans to develop a low cost transistor lab based on CBD and microcontact printing; develop chemical engineering educational modules based on microreaction technology; and continue developing and disseminating unit operations modules on microelectronics processing.