CAREER: Process Engineering of Chemical Bath Deposition: A Soft Solution Route to Flexible Electronics

这项职业资助结合了微电子加工领域的研究和教育举措。研究：研究计划专注于通过低温加工技术在柔性聚合物基板上制造化合物半导体器件。与非晶硅和有机半导体相比，大多数化合物半导体具有更高的本征载流子迁移率的优势。化学浴沉积(CBD)是一种基于水溶液的薄膜沉积技术，具有在低温下沉积外延化合物半导体层的能力。对CBD过程的基本理解是有限的。该项目包括开发基础研究颗粒成核、生长、沉积和分子水平非均相薄膜生长机理的实验技术，以及开发用于定制薄膜微结构和纳米结构的n撞击流CBD反应器。撞击流反应器利用微反技术来控制纳米颗粒在撞击流量中的大小和分布。该项目的成功实施不仅将促进对柔性半导体器件制造的CBD工艺的基本了解，还将为许多基于溶液的工艺的颗粒形成和沉积特性的基础研究建立新的研究工具。此外，撞击流CBD反应器可能带来一种新的用于纳米研磨的薄膜沉积技术。广泛的影响：作为对研究计划的补充，PI计划在综合研究文献和他自己的研究活动的基础上开发实验室模块。他计划利用现代技术应用作为学习基础知识的范例-为此，他计划开发一个基于CBD和微接触印刷的低成本晶体管实验室；开发基于微反应技术的化学工程教学模块；并继续开发和传播微电子加工的单元操作模块。

This CAREER grant combines research and educational initiatives in the area of microelectronics processing.Research:The research program focuses on fabrication of compound semiconductor devices on flexible polymeric substrates by low temperature processing technology. Most compound semiconductors have the advantage of higher intrinsic carrier mobility over amorphous silicon and organic semiconductors. Chemical bath deposition (CBD) is an aqueous solution-based film deposition technique with the capability to deposit epitaxial compound semiconductor layers at low temperatures. Fundamental understanding of the CBD process is limited. This project involves the development of experimental techniques for fundamental investigation of particle nucleation, growth, deposition and molecular level heterogeneous thin film growth mechanisms, and development of a n impinging flow CBD reactor to tailor thin film micro- and nanostructures. The impinging flow reactor takes advantage of the microreation technology to control nanoparticle size and distribution in the impinging fluxes. Successful implementation of this project will not only advance basic understanding of the CBD process for the fabrication of flexible semiconductor devices, it will also establish a new research tool for the fundamental investigation of particle formation and deposition characteristics of many solution-based processes. In addition, the impinging flow CBD reactor could lead to a new thin film deposition technique for nanofabrication.Broad Impact:Complementing the research plan is the PI's plan to develop laboratory modules based on the synthesis of the research literature and the his own research activities. He plans to use modern technical applications as example in learning the fundamentals - to this end he plans to develop a low cost transistor lab based on CBD and microcontact printing; develop chemical engineering educational modules based on microreaction technology; and continue developing and disseminating unit operations modules on microelectronics processing.