Electrosynthesized Nanocomposite for Microelectromechanical Systems

本研究的目的是研究两种或两种以上材料以纳米复合材料的形式组合在微机电系统应用中的微结构。第一项研究任务是通过在金属-有机/无机纳米复合材料的微观结构中加入纳米颗粒，以改性和增强材料的性能，减轻材料的疲劳和老化等力学缺陷，同时具有低温加工的优势和与微电子直接集成的可行性。这些微结构的结构是基于微致动器或传感器（如惯性传感器）应用的纳米复合材料制成的悬浮机械微结构。第二个研究任务旨在研究基于导电聚合物的纳米复合材料，该复合材料通过将纳米物质（如化学品、酶或生物标记物）封装到生物传感器应用的微结构中而制成。该结构基于微间隙结构，将填充导电纳米复合材料和原位封装纳米颗粒，如用于生物传感应用的酶。电合成纳米复合材料将为微机电系统创造广泛的新型传感器应用，如在无线通信系统中用作精密滤波器的高频机械谐振器，以及辅助糖尿病患者日常生活的一次性葡萄糖传感器。对于工业来说，这项研究将提供潜在的工业应用(a)纳米复合材料用于微结构的先进制造能力和(b)使用纳米复合材料与微电子集成与微系统相互作用的新方法。对于学术界来说，这项研究的结果将为纳米复合材料的设计、制造和应用开辟一个新的领域。

The objective of this research is to investigate the combination of two or more materials in the form of nanocomposite in making microstructures for Microelectromechanical Systems applications. The first research task focuses on metal-organic/inorganic nanocomposites by adding nanoparticles into microstructures in order to modify and strengthen the material properties and alleviate the mechanical deficiency such as fatigue and aging with the advantage of low temperature processing and feasibility for direct integration with microelectronics. The architecture of these microstructures is based on suspended mechanical microstructures made of nanocomposite for micro actuators or sensors such as inertial sensors applications. The second research task aims to study conductive-polymer based nanocomposite made by encapsulating nano substances such as chemicals, enzymes, or biomarkers into microstructures for biosensor applications. The architecture is based on the micro-gap structures that will be filled with conductive nanocomposite with in situ encapsulated nanoparticles such as enzymes for bio-sensing applications. Electrosynthesized nanocomposite will create a wide range of novel sensor applications for Microelectromechanical systems such as high frequency mechanical resonators that perform as precision filters in wireless communication systems, and disposable glucose sensors that assist daily life of diabetic patients. For industry, this research will provide potential industrial applications with (a) advanced manufacturing capability of nanocomposite for microstructures and (b) new ways to interact with micro systems using nanocomposite integrated with microelectronics. For the academic world, results of the proposed research will open a new area in nanocomposite-based design, manufacturing and applications.