Electrosynthesized Nanocomposite for Microelectromechanical Systems

本研究的目的是研究两种或两种以上材料的组合，在微机电系统应用的微结构的纳米复合材料的形式。 第一个研究任务的重点是金属-有机/无机纳米复合材料，通过将纳米颗粒添加到微结构中，以修改和增强材料性能，并减轻机械缺陷，如疲劳和老化，具有低温加工的优点和与微电子直接集成的可行性。 这些微结构的体系结构是基于悬浮的机械微结构，由纳米复合材料制成，用于微致动器或传感器，如惯性传感器应用。 第二项研究任务旨在研究基于导电聚合物的纳米复合材料，该纳米复合材料通过将化学品、酶或生物标志物等纳米物质封装到微结构中而制成，用于生物传感器应用。 该架构是基于微间隙结构，将填充有导电纳米复合材料与原位封装的纳米粒子，如酶的生物传感应用。 电合成纳米复合材料将为微机电系统创造广泛的新型传感器应用，例如在无线通信系统中用作精密滤波器的高频机械谐振器，以及辅助糖尿病患者日常生活的一次性葡萄糖传感器。 对于工业，这项研究将提供潜在的工业应用与（a）先进的制造能力的纳米复合材料的微结构和（B）新的方式与微系统相互作用，使用纳米复合材料与微电子集成。 对于学术界来说，拟议研究的结果将为基于纳米复合材料的设计，制造和应用开辟一个新的领域。

The objective of this research is to investigate the combination of two or more materials in the form of nanocomposite in making microstructures for Microelectromechanical Systems applications. The first research task focuses on metal-organic/inorganic nanocomposites by adding nanoparticles into microstructures in order to modify and strengthen the material properties and alleviate the mechanical deficiency such as fatigue and aging with the advantage of low temperature processing and feasibility for direct integration with microelectronics. The architecture of these microstructures is based on suspended mechanical microstructures made of nanocomposite for micro actuators or sensors such as inertial sensors applications. The second research task aims to study conductive-polymer based nanocomposite made by encapsulating nano substances such as chemicals, enzymes, or biomarkers into microstructures for biosensor applications. The architecture is based on the micro-gap structures that will be filled with conductive nanocomposite with in situ encapsulated nanoparticles such as enzymes for bio-sensing applications. Electrosynthesized nanocomposite will create a wide range of novel sensor applications for Microelectromechanical systems such as high frequency mechanical resonators that perform as precision filters in wireless communication systems, and disposable glucose sensors that assist daily life of diabetic patients. For industry, this research will provide potential industrial applications with (a) advanced manufacturing capability of nanocomposite for microstructures and (b) new ways to interact with micro systems using nanocomposite integrated with microelectronics. For the academic world, results of the proposed research will open a new area in nanocomposite-based design, manufacturing and applications.