Electrosynthesized Nanocomposite for Microelectromechanical Systems

这项研究的目的是研究两种或两种以上的材料以纳米复合材料的形式结合在一起制造用于微电子机械系统应用的微结构。第一个研究任务集中在金属-有机/无机纳米复合材料中，将纳米颗粒添加到微结构中，以改善和增强材料的性能，缓解疲劳和老化等机械缺陷，具有低温加工和直接与微电子集成的优势。这些微结构的结构是基于由纳米复合材料制成的悬浮式机械微结构，用于微执行器或传感器，如惯性传感器应用。第二个研究任务旨在研究导电聚合物基纳米复合材料，这种纳米复合材料是通过将化学物质、酶或生物标志物等纳米物质封装到微结构中应用于生物传感器而制成的。该体系结构基于微间隙结构，这些微间隙结构将填充带有原位包裹的纳米颗粒的导电纳米复合材料，例如用于生物传感应用的酶。电合成纳米复合材料将为微电子机械系统创造广泛的新型传感器应用，例如在无线通信系统中用作精密过滤器的高频机械谐振器，以及帮助糖尿病患者日常生活的一次性葡萄糖传感器。对于工业，这项研究将提供潜在的工业应用：(A)用于微结构的纳米复合材料的先进制造能力；(B)利用与微电子集成的纳米复合材料与微系统相互作用的新方法。对于学术界来说，拟议的研究成果将在基于纳米复合材料的设计、制造和应用方面开辟一个新的领域。

The objective of this research is to investigate the combination of two or more materials in the form of nanocomposite in making microstructures for Microelectromechanical Systems applications. The first research task focuses on metal-organic/inorganic nanocomposites by adding nanoparticles into microstructures in order to modify and strengthen the material properties and alleviate the mechanical deficiency such as fatigue and aging with the advantage of low temperature processing and feasibility for direct integration with microelectronics. The architecture of these microstructures is based on suspended mechanical microstructures made of nanocomposite for micro actuators or sensors such as inertial sensors applications. The second research task aims to study conductive-polymer based nanocomposite made by encapsulating nano substances such as chemicals, enzymes, or biomarkers into microstructures for biosensor applications. The architecture is based on the micro-gap structures that will be filled with conductive nanocomposite with in situ encapsulated nanoparticles such as enzymes for bio-sensing applications. Electrosynthesized nanocomposite will create a wide range of novel sensor applications for Microelectromechanical systems such as high frequency mechanical resonators that perform as precision filters in wireless communication systems, and disposable glucose sensors that assist daily life of diabetic patients. For industry, this research will provide potential industrial applications with (a) advanced manufacturing capability of nanocomposite for microstructures and (b) new ways to interact with micro systems using nanocomposite integrated with microelectronics. For the academic world, results of the proposed research will open a new area in nanocomposite-based design, manufacturing and applications.