Direct Synthesis, Assembly and Integration of Graphene via Micro CVD

本研究的目的是发展石墨烯的合成，组装和集成的方法，通过局部化学气相沉积。 石墨烯是一种二维纳米结构，与微电子集成后可形成高灵敏度的信号转导系统，具有信号转导、处理、控制和通讯等功能。 该项目利用微结构作为石墨烯片上集成的加热平台，而不是传统的炉。 这种方法提供了超快冷却控制的灵活性，以生产具有良好质量和均匀性的石墨烯。 此外，局部加热使得石墨烯与微电子器件能够在室温室中直接集成，同时允许在选择性局部区域中进行高温处理。 可以很好地控制石墨烯的放置、合成、组装和集成，以实现基于石墨烯的传感系统。 该项目将研究和表征通过局部化学气相沉积工艺合成石墨烯的机制，包括工艺协议，传热和传质过程，微结构的设计和制造，合成石墨烯的性能和均匀性，以及与微电子的系统级集成。 石墨烯与片上微电子的直接合成、组装和集成能力可能对各种应用领域产生深远影响，包括石墨烯传感器的先进制造能力。 它将有利于一般的微机电系统社区，激发石墨烯以外的纳米器件开发，如纳米线和基于纳米管的集成传感器。 研究和教育的协同作用以及制造，材料科学和物理转换原理之间的相互作用和整合将成为下一代科学家和工程师研究/教育专业知识多学科融合的引擎。

The objective of this research is to develop the synthesis, assembly and integration process for graphene by means of local chemical vapor deposition. Graphene, a two-dimensional nanostructure, could form a highly sensitive transduction system when integrated with microelectronics to possess the capabilities of signal transduction, processing, control and communication. This project utilizes micro structure as the heating platform instead of conventional furnace for on-chip integration of graphene. This approach offers flexibility in ultrafast cooling control to produce graphene with good quality and uniformity. Furthermore, local heating enables the direct integration of graphene with microelectronics in a room temperature chamber while allowing high temperature processes in selective local areas. Placement, synthesis, assembly and integration of graphene can be well-controlled to enable graphene-based sensing systems. This project will investigate and characterize graphene synthesis mechanisms by the local chemical vapor deposition process, including process protocols, heat and mass transfer processes, design and fabrication of microstructures, property and uniformity of synthesized graphene, and system-level integration with microelectronics. The capability of direct synthesis, assembly and integration of graphene with on-chip microelectronics could have a profound impact in various application areas, including advanced manufacturing capabilities for graphene-based sensors. It will benefit the general Microelectromechanical Systems community to inspire nano device development beyond graphene, such as nanowires and nanotubes-based integrated sensors. The synergy of research and education interaction and integration between manufacturing, material sciences and physical transduction principles will be an engine for the multidisciplinary fusion in research/education expertise for the next-generation scientists and engineers.