Direct Synthesis, Assembly and Integration of Graphene via Micro CVD

本研究的目的是利用局部化学气相沉积技术开发石墨烯的合成、组装和集成工艺。石墨烯是一种二维纳米结构，当与微电子集成时，可以形成一个高灵敏度的转导系统，具有信号转导、处理、控制和通信的能力。本项目利用微结构作为加热平台，取代传统炉，实现石墨烯片上集成。这种方法提供了超快冷却控制的灵活性，以生产质量好、均匀的石墨烯。此外，局部加热使石墨烯与微电子在室温腔室中直接集成，同时允许在选择性局部区域进行高温处理。石墨烯的放置、合成、组装和集成可以很好地控制，以实现基于石墨烯的传感系统。该项目将通过局部化学气相沉积工艺研究和表征石墨烯的合成机制，包括工艺协议、传热传质过程、微结构的设计和制造、合成石墨烯的性能和均匀性，以及与微电子技术的系统级集成。石墨烯与片上微电子的直接合成、组装和集成能力将对各种应用领域产生深远的影响，包括基于石墨烯的传感器的先进制造能力。这将有利于一般的微机电系统社区，激发石墨烯以外的纳米器件的发展，如纳米线和纳米管为基础的集成传感器。制造、材料科学和物理转导原理之间的研究和教育互动和整合的协同作用将成为下一代科学家和工程师在研究/教育专业知识方面的多学科融合的引擎。

The objective of this research is to develop the synthesis, assembly and integration process for graphene by means of local chemical vapor deposition. Graphene, a two-dimensional nanostructure, could form a highly sensitive transduction system when integrated with microelectronics to possess the capabilities of signal transduction, processing, control and communication. This project utilizes micro structure as the heating platform instead of conventional furnace for on-chip integration of graphene. This approach offers flexibility in ultrafast cooling control to produce graphene with good quality and uniformity. Furthermore, local heating enables the direct integration of graphene with microelectronics in a room temperature chamber while allowing high temperature processes in selective local areas. Placement, synthesis, assembly and integration of graphene can be well-controlled to enable graphene-based sensing systems. This project will investigate and characterize graphene synthesis mechanisms by the local chemical vapor deposition process, including process protocols, heat and mass transfer processes, design and fabrication of microstructures, property and uniformity of synthesized graphene, and system-level integration with microelectronics. The capability of direct synthesis, assembly and integration of graphene with on-chip microelectronics could have a profound impact in various application areas, including advanced manufacturing capabilities for graphene-based sensors. It will benefit the general Microelectromechanical Systems community to inspire nano device development beyond graphene, such as nanowires and nanotubes-based integrated sensors. The synergy of research and education interaction and integration between manufacturing, material sciences and physical transduction principles will be an engine for the multidisciplinary fusion in research/education expertise for the next-generation scientists and engineers.