FRG: High Pressure Phase Transformations of Silicon, Germanium and Silicon Nitride

FRG：硅、锗和氮化硅的高压相变

• 批准号: 0403650
• 负责人: John Patten
• 金额: $ 57.2万
• 依托单位: Western Michigan University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-08-01 至 2006-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0403650&HistoricalAwards=false
• 关键词: FRG; Pressure; Phase; Transformations; Silicon

The objective of the proposed research program is to establish an interdisciplinary group of researchers from UN-Charlotte, NCSU and U TN with the necessary range of expertise to characterize the role and influence of the high pressure phase transformations of silicon, germanium, and silicon nitride during manufacturing processing. It is envisaged that this material behavior may be exploited to improve the manufacturing processes by increasing yields, decreasing defects, and reducing the manufacturing costs of devices and products manufactured from these materials. The research plan proposes to extend significantly the understanding of the fundamental principles and mechanics of the deformation and machining of these materials. The high-pressure phase transformations that occur during machining of silicon, germanium, and silicon nitride are a recently discovered manufacturing process mechanism. Existing scientific and engineering models do not include this important effect. It has been suggested that the knowledge of the existence of the high-pressure metallic phase of silicon "has about it the unmistakable scent of a major advance: it is likely to lead to a host of consequential researches". This knowledge is a major breakthrough for the semiconductor and optical research and materials' community. The use of the high-pressure phase transformations of these materials to improve the manufacturing process is a strategic change in the basic conception of the fundamental material process mechanisms. The necessary conditions for exploiting the high-pressure phase transformation of semiconductors and ceramics will be evaluated. This research will advance the knowledge of the mechanics of these materials and permit manufacturers to hurdle the present obstacles that confront them as they attempt to produce products of higher precision and lower cost. The high pressure phase transformation work on these materials promises to be applicable to other engineering ceramics, such as silicon carbide, and to manufacturing processes such as slicing, grinding, lapping and polishing. The high-pressure phase transformation represents a new means for controlling materials, manufacturing processes, and equipment to produce the desired end effect or product. The global importance of semiconductors and ceramics has led to extensive research into the nature of surface deformation as a consequence of materials processes such as machining, grinding, lapping and polishing. With the exception of steels, semiconductors and their various physical properties as the target for research are unsurpassed in terms of human effort invested. In spite of this a detailed knowledge of the physical processes involved in elastic and more so plastic deformation is still at issue. Based on accumulated knowledge it is recognized that the high-pressure phase transformations of silicon (Si), germanium (Ge), and silicon nitride (Si3N4) are responsible for their ductile material behavior during mechanical deformation-based material fabrication processes. The proposed team-based project will provide the direction, focus and synergy needed to successfully bring current knowledge of the influence of the high pressure phase transformation to the forefront of research activities in such areas as materials, tribology, and precision engineering. Through the proposed multi-university small group effort our effectiveness is enhanced by providing for the extension of the basic knowledge and potential relevance of the high pressure phase of these materials to applications involving friction, wear and precision machining. This small group of researchers will provide a coordinated and integrated resource group to industry. The group will provide a reference source for information and expertise on material processing of silicon, germanium and silicon nitride.

拟议的研究计划的目标是建立一个跨学科的研究人员小组，来自UN-Charlotte，NCSU和U TN，具有必要的专业知识，以表征硅，锗和氮化硅在制造过程中的高压相变的作用和影响。 可以设想，可以利用这种材料行为来通过增加产率、减少缺陷和降低由这些材料制造的器件和产品的制造成本来改进制造工艺。 该研究计划提出要大大扩展对这些材料的变形和加工的基本原理和力学的理解。 在硅、锗和氮化硅的加工过程中发生的高压相变是最近发现的制造工艺机制。 现有的科学和工程模型不包括这一重要效应。 有人认为，硅的高压金属相的存在的知识“有一个重大进步的明确气味：它可能导致大量的重要研究”。这些知识是半导体和光学研究以及材料界的重大突破。 利用这些材料的高压相变来改进制造工艺是基本材料加工机制基本概念的战略性变革。 将评估利用半导体和陶瓷高压相变的必要条件。 这项研究将促进这些材料的力学知识，并允许制造商克服目前面临的障碍，因为他们试图生产更高精度和更低成本的产品。 这些材料的高压相变工作有望适用于其他工程陶瓷，如碳化硅，以及制造工艺，如切片，研磨，研磨和抛光。 高压相变代表了一种控制材料、制造工艺和设备以产生所需最终效果或产品的新手段。 半导体和陶瓷的全球重要性导致了对表面变形性质的广泛研究，这些变形是材料加工，如机械加工，研磨，研磨和抛光的结果。 除了钢之外，半导体及其各种物理特性作为研究对象，在人力投入方面是无与伦比的。尽管如此，关于弹性变形和塑性变形中涉及的物理过程的详细知识仍然是有争议的。 基于积累的知识，认识到硅（Si）、锗（Ge）和氮化硅（Si 3 N4）的高压相变是它们在基于机械变形的材料制造工艺期间的延展性材料行为的原因。 拟议的基于团队的项目将提供成功地将高压相变影响的现有知识带到材料，摩擦学和精密工程等领域研究活动的最前沿所需的方向，重点和协同作用。 通过拟议的多所大学的小组努力，我们的有效性得到提高，提供的基础知识和潜在的相关性，这些材料的高压阶段的应用，涉及摩擦，磨损和精密加工。 这个研究小组将为工业界提供一个协调和综合的资源小组。 该小组将为硅、锗和氮化硅材料加工的信息和专业知识提供参考来源。