NER: Difference-Defined Nanofabrication

NER：差异定义的纳米加工

• 批准号: 0403712
• 负责人: Alan Seabaugh
• 金额: --
• 依托单位: University of Notre Dame
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-07-01 至 2005-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0403712&HistoricalAwards=false
• 关键词: NER; Difference; Defined; Nanofabrication

The objective of this research is to develop a new manufacturing technique for nanoscale devices and molecular interconnections with the potential for producing self-aligned ten-nanometer-scale metal structures with spacings controlled at the nanometer scale. The approach is to use electron-beam evaporation through a stencil mask onto a semiconductor or other substrate. The stencil mask is translated with respect to the substrate with nanometer precision between evaporations of dissimilar materials. The materials are selected to have dissimilar etch chemistry such that upon subsequent etching one of the materials is removed. The remaining material has a size determined by the difference between the two patterns. This process is termed difference-defined nanofabrication. Since commercial nanopositioners can perform translations with one-nanometer precision, difference-defined nanofabrication allows feature size control at the single-nanometer level. Difference-defined nanofabrication is an inherently clean, organic-free technique. The capabilities of this approach will be demonstrated through the development of a nanoelectromechanical tunneling transistor and electrical test structures for molecules.The societal benefits of this research are in the advancement of nanotechnology. Nanotechnology takes many forms and will be broadly applied in health care, homeland security, and information technology applications, creating new jobs in manufacturing and service in the United States. The research undertaken here promotes the development of new ways to form solid state, molecular, and bioelectronic devices and sensors and to make electrical connections at the molecular scale. Success in this effort will accelerate the ability of researcher to construct devices at the nanometer scale.

本研究的目的是开发一种新的纳米器件和分子互连的制造技术，具有生产自对准的10纳米级金属结构的潜力，其间距控制在纳米级。该方法是使用电子束蒸发通过模板掩模到半导体或其他基板上。模板掩模相对于衬底在不同材料的蒸发之间以纳米精度平移。材料被选择为具有不同的蚀刻化学，使得在随后的蚀刻时，材料之一被去除。剩余的材料具有由两个图案之间的差异确定的尺寸。这个过程被称为差异定义的纳米纤维。由于商业纳米定位器可以以一纳米的精度进行平移，因此差异定义的纳米机器人允许在单纳米水平上控制特征尺寸。差异定义的纳米纤维是一种本质上清洁、无有机物的技术。这种方法的能力将通过开发纳米机电隧道晶体管和分子的电测试结构来证明。这项研究的社会效益是在纳米技术的进步。纳米技术有多种形式，将广泛应用于医疗保健、国土安全和信息技术应用，为美国的制造业和服务业创造新的就业机会。在这里进行的研究促进了形成固态、分子和生物电子器件和传感器的新方法的发展，并在分子尺度上进行电连接。这一努力的成功将加速研究人员在纳米尺度上构建器件的能力。