NIRT: Nanocrystalline Diamond Thin Films for MEMS and Biomedical Devices

本研究的目标是合成具有非常小的晶粒尺寸（5-10 nm）、较低的表面粗糙度（20-30 nm）和较小的内应力的纳米金刚石薄膜，并将其非凡的特性应用于各种应用，如微机电系统（MEMS）和生物医学器件。研究重点将是：1）通过使用新的等离子体化学合成纳米结构（5- 10 nm）金刚石薄膜; 2）开发和应用先进的表征技术，以了解这种材料在纳米尺度下的机械和摩擦学特性; 3）展示在关键技术中的潜在应用，包括高保真MEMS和生物医学设备; 4）模拟纳米金刚石薄膜的生长和所得性质，这对MEMS和生物应用很重要。该项目的基本原理是基于这样一个事实，即随着材料的晶粒尺寸减小到纳米级，材料特性会发生急剧变化。通过在纳米尺度下控制晶粒尺寸和晶界结构，将实现非凡的材料性能，包括高硬度、高断裂强度、高杨氏模量、极低的摩擦系数和高耐磨性、可忽略的静摩擦、沉积膜中的低残余应力。 在更广泛的范围内，这项研究计划的成功完成将为新型纳米结构材料和器件的设计提供知识基础。NIRT项目将为来自不同学科的研究生和本科生的研究，教育和培训提供一个独特的环境，国家实验室，行业和国际合作者的积极参与。与会者的协同作用和互补专长将使我们的小组能够解决复杂的问题，并促进交流想法和成果。本科生和研究生将参与尖端研究工具的开发和使用，并将接受纳米技术前沿的优秀培训。一个充满活力的教育和推广计划将积极推行，使纳米技术的大学预科学生，教师和公众。 这项研究的一个基本和重要组成部分将是通过在期刊上发表文章，在会议上介绍，并直接向合作者传播结果。这NIRT计划将努力教育下一代的科学家和工程师，将发挥关键作用，在推进纳米技术的研究和开发在21世纪。

The objective of this research is to synthesize nanocrystalline diamond thin films with very small grain size (5-10 nm), lower surface roughness (20-30 nm) and less internal stress and utilize its extraordinary properties in various applications such as microelectromechanical systems (MEMS) and biomedical devices. The research focus will be: 1) to synthesize nanostructured (5-10nm) diamond thin films by using novel plasma chemistry; 2) to develop and apply advanced characterization techniques to understand mechanical and tribological properties of this material at the nanoscale; 3) to demonstrate potential applications in critical technologies including high fidelity MEMS and biomedical devices; 4) to model the growth and resulting properties of nanodiamond thin films important for MEMS and bioapplications. The rationale for this project is based on the fact that material properties change drastically as the grain size of the materials reduces to the nano-scale. By controlling the grain size and grain boundary structure at the nanoscale extraordinary materials properties will be achieved including high hardness, high fracture strength, high Young's modulus, extremely low friction coefficient and high wear resistance, negligible stiction, low residual stress in as-deposited films. On a broader scale, successful completion of this research program will lead to a knowledge base for design of novel nanostructured materials and devices. The NIRT projects will provide a unique environment for the research, education and training of graduate and undergraduate students from different disciplines in interdisciplinary setting with active participation of national laboratories, industry and international collaborators. The synergism and complementary expertise of the participants will allow our group to address complex problems and facilitate sharing of ideas and results. Undergraduate and graduate students will be involved in the development and use of cutting-edge research tools and will receive excellent training at the frontiers of nanotechnology. A vigorous education and outreach program will be aggressively pursued to bring nanotechnology to pre-college students, teachers and general public. An essential and important component of this research will be the dissemination of the results through publications in journals, presentation at meetings, and directly to collaborators. This NIRT program will strive to educate next generation of scientists and engineers that will play a key role in advancing nanotechnology research and development in 21st Century.