Study of Reliability and Modeling for Process Optimization and Yield Improvements in Chemical Mechanical Planarization
化学机械平坦化工艺优化和产量提高的可靠性和建模研究
基本信息
- 批准号:0727320
- 负责人:
- 金额:$ 30万
- 依托单位:
- 依托单位国家:美国
- 项目类别:Standard Grant
- 财政年份:2007
- 资助国家:美国
- 起止时间:2007-09-01 至 2012-08-31
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
The objective of this research is to optimize the chemical mechanical planarization process using experimental evaluation of mechanical reliability of low dielectric constant materials. Extensive post surface metrology, mechanical and interfacial analysis of the materials, and consumables like pad and slurry used in polishing will be done to gain a fundamental analysis of the planarization process from different perspectives. The research will investigate the roles played by the consumables on surface defect generation at the fundamental level. This investigation will allow optimization of pad design, material selection, process pressure, orbital and linear speed, chemical solution, within wafer uniformity and local planarization. Modeling of interfacial adhesion will allow optimization of process conditions, pad physical properties, and chemical additives in order to reduce within uniformity and delamination of thin film stacks. Reliability issues related to dielectric materials will provide an optimal solution for improved yield without compromising the throughput.If successful, the finding of this investigation will result in improved equipment and process designs as well as significant reduction in design cycle time and cost. The research will have a profound impact on integration, device yield, and consumables development resulting in a significant economic payoff. The research will be integrated into existing and new courses in the investigators program and other steps will be taken to stimulate the interest of undergraduates and minority student engineers in microelectronics industries. The results will be disseminated in a timely manner through presentation at national/international conferences and publications in archival journals.
本研究的目的是通过对低介电常数材料机械可靠性的实验评估来优化化学机械平坦化工艺。广泛的后表面计量,材料的机械和界面分析,以及抛光中使用的抛光垫和抛光液等耗材将从不同的角度对平面化过程进行基本分析。本研究将从根本上研究耗材对表面缺陷产生的作用。这项调查将允许优化垫设计,材料选择,工艺压力,轨道和线速度,化学溶液,在晶圆均匀性和局部平面化。界面粘附的建模将允许优化工艺条件、焊盘物理性质和化学添加剂,以减少薄膜堆叠的均匀性和分层。与介电材料相关的可靠性问题将为提高成品率而不影响产量提供最佳解决方案。如果成功,这项调查的结果将导致改进设备和工艺设计,以及显着减少设计周期时间和成本。该研究将对集成、器件良率和耗材开发产生深远影响,从而产生显著的经济回报。这项研究将被整合到现有的和新的课程中,并将采取其他措施,以激发本科生和少数民族学生工程师对微电子行业的兴趣。将通过在国家/国际会议上介绍和在档案刊物上发表的方式及时传播研究结果。
项目成果
期刊论文数量(0)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
数据更新时间:{{ journalArticles.updateTime }}
{{
item.title }}
{{ item.translation_title }}
- DOI:
{{ item.doi }} - 发表时间:
{{ item.publish_year }} - 期刊:
- 影响因子:{{ item.factor }}
- 作者:
{{ item.authors }} - 通讯作者:
{{ item.author }}
数据更新时间:{{ journalArticles.updateTime }}
{{ item.title }}
- 作者:
{{ item.author }}
数据更新时间:{{ monograph.updateTime }}
{{ item.title }}
- 作者:
{{ item.author }}
数据更新时间:{{ sciAawards.updateTime }}
{{ item.title }}
- 作者:
{{ item.author }}
数据更新时间:{{ conferencePapers.updateTime }}
{{ item.title }}
- 作者:
{{ item.author }}
数据更新时间:{{ patent.updateTime }}
Ashok Kumar其他文献
Use of high-resolution IKONOS data and GIS technique for transformation of landuse/landcover for sustainable development.
使用高分辨率 IKONOS 数据和 GIS 技术来改造土地利用/土地覆盖,以实现可持续发展。
- DOI:
- 发表时间:
2010 - 期刊:
- 影响因子:1
- 作者:
P. Kunwar;T. S. Kachhwaha;Ashok Kumar;A. Agrawal;Amrita Singh;N. Mendiratta - 通讯作者:
N. Mendiratta
Cerebral blood flow velocity in asymptomatic premature neonates exposed to clinical chorioamnionitis
临床绒毛膜羊膜炎无症状早产儿脑血流速度
- DOI:
- 发表时间:
2014 - 期刊:
- 影响因子:0
- 作者:
S. Basu;S. Dewangan;S. Barman;S. Anupurba;R. Shukla;Ashok Kumar - 通讯作者:
Ashok Kumar
A minimally-invasive cryogel based approach for the development of human ectopic liver in a mouse model.
一种基于微创冷冻凝胶的方法,用于在小鼠模型中发育人类异位肝脏。
- DOI:
10.1002/jbm.b.34454 - 发表时间:
2020 - 期刊:
- 影响因子:0
- 作者:
J. Kumari;A. Teotia;A. Karande;Ashok Kumar - 通讯作者:
Ashok Kumar
A rare association of hydranencephaly with congenital rubella syndrome.
积水脑畸形与先天性风疹综合征的罕见关联。
- DOI:
- 发表时间:
2007 - 期刊:
- 影响因子:4.3
- 作者:
S. Basu;Ashok Kumar;S. Gupta;B. Bhatia - 通讯作者:
B. Bhatia
GST Polymorphisms and GST Enzyme Activity in Type 1 Myotonic Dystrophy
1 型强直性肌营养不良中的 GST 多态性和 GST 酶活性
- DOI:
- 发表时间:
2015 - 期刊:
- 影响因子:0
- 作者:
Ashok Kumar;S. Agarwal;Suni;L. Pradhan - 通讯作者:
L. Pradhan
Ashok Kumar的其他文献
{{
item.title }}
{{ item.translation_title }}
- DOI:
{{ item.doi }} - 发表时间:
{{ item.publish_year }} - 期刊:
- 影响因子:{{ item.factor }}
- 作者:
{{ item.authors }} - 通讯作者:
{{ item.author }}
{{ truncateString('Ashok Kumar', 18)}}的其他基金
RAPID: Novel Functionalized Nanomaterials for Effective Remediation of Spilled Oil Contaminants in the Gulf of Mexico
RAPID:新型功能化纳米材料可有效修复墨西哥湾泄漏石油污染物
- 批准号:
1066649 - 财政年份:2011
- 资助金额:
$ 30万 - 项目类别:
Standard Grant
EAGER: Novel Nano-hybrid Structured Regioregular Polyhexylthiophenes Blend Films for Organic Photovoltaic Applications
EAGER:用于有机光伏应用的新型纳米混合结构立体规则聚己基噻吩共混薄膜
- 批准号:
1066643 - 财政年份:2010
- 资助金额:
$ 30万 - 项目类别:
Standard Grant
MRI: Acquisition of an Ultrahigh Analytical Thermal Field Emission Scanning Electron Microscope for Research and Education
MRI:购买用于研究和教育的超高分析热场发射扫描电子显微镜
- 批准号:
0922850 - 财政年份:2009
- 资助金额:
$ 30万 - 项目类别:
Standard Grant
GOALI/Collaborative Research: Interface Engineered Diamond Coatings for Dry Machining
GOALI/合作研究:用于干式加工的界面工程金刚石涂层
- 批准号:
0928823 - 财政年份:2009
- 资助金额:
$ 30万 - 项目类别:
Continuing Grant
Engineering and Computer Science Scholars Targeted for Academic, Retention and Success (STARS) at the University of South Florida
南佛罗里达大学工程和计算机科学学者的学术、保留和成功 (STARS)
- 批准号:
0807023 - 财政年份:2008
- 资助金额:
$ 30万 - 项目类别:
Standard Grant
Collaborative Project: An Information Security Track Development - University of Louisville, Kentucky State University
合作项目:信息安全轨道开发 - 路易斯维尔大学、肯塔基州立大学
- 批准号:
0417047 - 财政年份:2004
- 资助金额:
$ 30万 - 项目类别:
Standard Grant
NIRT: Nanocrystalline Diamond Thin Films for MEMS and Biomedical Devices
NIRT:用于 MEMS 和生物医学设备的纳米晶金刚石薄膜
- 批准号:
0404137 - 财政年份:2004
- 资助金额:
$ 30万 - 项目类别:
Standard Grant
GOALI: Investigating Metrology Issues in Chemical Mechanical Planarization Process for Microelectronics Manufacturing
GOALI:研究微电子制造化学机械平坦化工艺中的计量问题
- 批准号:
0218141 - 财政年份:2002
- 资助金额:
$ 30万 - 项目类别:
Standard Grant
MRI: Acquisition of a Transmission Electron Microscope for Multi-disciplinary Research and Education
MRI:购买透射电子显微镜用于多学科研究和教育
- 批准号:
0216308 - 财政年份:2002
- 资助金额:
$ 30万 - 项目类别:
Standard Grant
CAREER: A Faculty Early Career Program in Development of Superhard Coatings for Improved Performances
职业生涯:开发超硬涂层以提高性能的教师早期职业计划
- 批准号:
9983535 - 财政年份:2000
- 资助金额:
$ 30万 - 项目类别:
Standard Grant
相似海外基金
Collaborative Research: Digital Twin Predictive Reliability Modeling of Solid-State Transformers
合作研究:固态变压器的数字孪生预测可靠性建模
- 批准号:
2228873 - 财政年份:2023
- 资助金额:
$ 30万 - 项目类别:
Standard Grant
Collaborative Research: Digital Twin Predictive Reliability Modeling of Solid-State Transformers
合作研究:固态变压器的数字孪生预测可靠性建模
- 批准号:
2228872 - 财政年份:2023
- 资助金额:
$ 30万 - 项目类别:
Standard Grant
CAREER: Reliability of Three-dimensional Interconnects for Heterogeneous Integration: An Integrated Experimental and Modeling Study
职业:异构集成三维互连的可靠性:综合实验和建模研究
- 批准号:
2144033 - 财政年份:2022
- 资助金额:
$ 30万 - 项目类别:
Continuing Grant
Intelligent Reliability Assurance Using Dynamics Modeling and Machine Learning
使用动力学建模和机器学习的智能可靠性保证
- 批准号:
RGPIN-2021-02900 - 财政年份:2021
- 资助金额:
$ 30万 - 项目类别:
Discovery Grants Program - Individual
Research Initiation Award: Uncertainty Modeling, Probabilistic Models, and Life-cycle Reliability of Floating Offshore Wind Turbines
研究启动奖:浮动海上风力发电机的不确定性建模、概率模型和生命周期可靠性
- 批准号:
2118586 - 财政年份:2021
- 资助金额:
$ 30万 - 项目类别:
Standard Grant
Reliability and validity of the Scale for Measuring Novice Nurses Modeling in Nursing Practice and its impact on workplace adjustment
护理实践中新手护士建模测量量表的信度和效度及其对工作场所调整的影响
- 批准号:
20K19016 - 财政年份:2020
- 资助金额:
$ 30万 - 项目类别:
Grant-in-Aid for Early-Career Scientists
III: Small: Collaborative Research: Social Media Based Analysis of Adverse Drug Events: User Modeling, Signal Reliability, and Signal Validation
III:小:协作研究:基于社交媒体的药物不良事件分析:用户建模、信号可靠性和信号验证
- 批准号:
2039915 - 财政年份:2020
- 资助金额:
$ 30万 - 项目类别:
Standard Grant
Reliability Modeling of Shoulder Fatigue and Recovery for Warehouse Operators Performing Dynamic Tasks
仓库操作员执行动态任务的肩部疲劳和恢复的可靠性建模
- 批准号:
9896072 - 财政年份:2020
- 资助金额:
$ 30万 - 项目类别:
Reliability Modeling of Shoulder Fatigue and Recovery for Warehouse Operators Performing Dynamic Tasks
仓库操作员执行动态任务的肩部疲劳和恢复的可靠性建模
- 批准号:
10268924 - 财政年份:2020
- 资助金额:
$ 30万 - 项目类别:
Stochastic modeling in hydrology and reliability theory, and optimal control of dynamical systems
水文学和可靠性理论中的随机建模以及动力系统的最优控制
- 批准号:
RGPIN-2014-05273 - 财政年份:2019
- 资助金额:
$ 30万 - 项目类别:
Discovery Grants Program - Individual














{{item.name}}会员




